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首页> 外文期刊>Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on >An analytical and numerical study of acoustic mismatch effects on internal dielectrically transduced MEMS resonators
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An analytical and numerical study of acoustic mismatch effects on internal dielectrically transduced MEMS resonators

机译：声学失配对内部介电换能MEMS谐振器的影响的分析和数值研究

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摘要

This paper presents a supplement to the 1-D theory of internal dielectric transduction by including the effects of acoustic mismatch on the resonant frequency and motional impedance of internal dielectrically transduced micromechanical resonators. Analytical expressions for the mode shapes in said resonators are mathematically derived and verified for various dielectric and resonator body materials by comparing numerical simulation results with finite element analysis results using commercial software. Correction factors to the resonant frequencies and motional impedances predicted by the original theory are presented to provide designers a simple yet accurate model that takes into account the effects of acoustic mismatch. Our analysis shows that the ratio of Young¿s moduli of the dielectric film and resonator body materials significantly impacts the motional impedance and thus must be considered when choosing the optimal dielectric material. This modified model will allow for precise and optimal design of internal dielectrically transduced micromechanical resonators for applications up to tens of gigahertz.
机译：本文通过包括声学失配对内部介电转换的微机械谐振器的谐振频率和运动阻抗的影响，对内部介电转换的一维理论进行了补充。通过使用商用软件将数值模拟结果与有限元分析结果进行比较，可以对各种谐振器和谐振器主体材料进行数学推导并验证所述谐振器中模式形状的解析表达式。提出了用原始理论预测的谐振频率和运动阻抗的校正因子，以为设计人员提供一个简单而准确的模型，该模型考虑了声学失配的影响。我们的分析表明，介电膜和谐振器主体材料的杨氏模量比显着影响运动阻抗，因此在选择最佳介电材料时必须考虑这一点。这种修改后的模型将允许对高达数十GHz的应用进行内部介电转换的微机械谐振器的精确和优化设计。

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