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An improved thick-film piezoelectric material by powder blending and enhanced processing parameters

机译:通过粉末共混改进的厚膜压电材料和提高的加工参数

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This paper details improvements of the d/sub 33/ coefficient for thick-film lead zirconate titanate (PZT) layers. In particular, the effect of blending ball and attritor milled powders has been investigated. Mathematical modeling of the film structure has produced initial experimental values for powder combination percentages. A range of paste formulations between 8:1 and 2:1 ball to attritor milled PZT powders by weight have been mixed into a screen-printable paste. Each paste contains 10% by weight of lead borosilicate glass and an appropriate quantity of solvent to formulate a screen printable thixotropic paste. A d/sub 33/ of 63.5 pC/N was obtained with a combination of 4:1 ball milled to attritor milled powder by weight. The improved paste combines the high d/sub 33/ values of ball and the consistency of attritor milled powder. The measured d/sub 33/ coefficient was further improved to 131 pC/N by increasing the furnace firing profile to 1000/spl deg/C, increasing the poling temperature to 200/spl deg/C, and using gold cermet and polymer electrodes that avoid silver migration effects and repeated firing of the PZT film.
机译:本文详细介绍了厚膜钛酸锆钛酸铅(PZT)层的d / sub 33 /系数的改进。特别地,已经研究了球磨机和磨粉机的混合效果。膜结构的数学模型已经产生了粉末混合百分比的初始实验值。已将一系列重量比介于8:1和2:1的球与磨碎机研磨的PZT粉末的糊剂配方混合到可丝网印刷的糊剂中。每种糊剂均包含10%重量的硼硅酸铅玻璃和适量的溶剂,以配制可丝网印刷的触变糊剂。 d / sub 33 /为63.5 pC / N,这是将4:1球磨成重量比经磨碎机磨碎的粉末的组合。改进的焊膏兼具高d / sub 33 /球值和磨碎机研磨粉的稠度。通过将炉子的燃烧曲线提高到1000 / spl deg / C,将极化温度提高到200 / spl deg / C,并使用金属陶瓷金和聚合物电极将测得的d / sub 33 /系数进一步提高到131 pC / N。避免银迁移效应和重复烧制PZT膜。

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