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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >A traveling-wave, modified ring linear piezoelectric microactuator with enclosed piezoelectric elements - the 'scream' actuator
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A traveling-wave, modified ring linear piezoelectric microactuator with enclosed piezoelectric elements - the 'scream' actuator

机译：带有封闭压电元件的行波式改进环形线性压电微型致动器-“尖叫”致动器

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摘要

A 1.8 cc silent bidirectional traveling-wave, self-moving linear microactuator is shown to be capable of generating a sliding velocity of 0.22 m/s and sliding force of 1.1 N. Through the use of computational analysis in the actuator's design, the vibration characteristics were improved in order to obtain a better actuator. The generation of a radial traveling wave about the circumference of the actuator, akin to a ring, is shown to exist despite the unusual shape, and the presence of traveling wave motion along the output face also is shown to exist. By using short-time sinusoidal signals, slider displacements as small as 82 nm were obtained from the actuator, and by using direct current (DC) input, displacements of up to /spl plusmn/107 nm were obtained, suggesting a way to obtain subnanometer positioning accuracy over arbitrary sliding distances. By reversing the phase between the paired driving signals, the direction of motion was reversed at up to 300 Hz; the slider displacement and velocity was found to be inversely proportional to the phase-reversal rate, and the slider's peak velocity and maximum thrust force were directly proportional to the phase between the driving signals. The output force and velocity of the actuator was fairly insensitive to the input frequency, giving measurable motion between 132.5 and 141.5 kHz, but was sensitive to the input voltage, requiring at least 38 V input for operation, and was approximately quadratically dependent on the applied preload centered about 2.25 N.
机译：所示的1.8 cc静音双向行波自移动线性微执行器能够产生0.22 m / s的滑动速度和1.1 N的滑动力。通过在执行器设计中使用计算分析，振动特性进行了改进，以获得更好的执行器。尽管形状不寻常，但仍存在围绕致动器圆周的类似于环的径向行波的产生，并且还存在沿输出面的行波运动的存在。通过使用短时正弦信号，可从执行器获得小至82 nm的滑块位移，并且通过使用直流（DC）输入，可获得高达/ spl plusmn / 107 nm的位移，这是获得亚纳米级的方法任意滑动距离上的定位精度。通过反转成对驱动信号之间的相位，运动方向以最高300 Hz的速度反转；发现滑块的位移和速度与相位反转率成反比，滑块的峰值速度和最大推力与驱动信号之间的相位成正比。执行器的输出力和速度对输入频率相当不敏感，可在132.5至141.5 kHz之间进行可测量的运动，但对输入电压敏感，需要至少38 V的输入才能运行，并且大致取决于所应用的预紧力约为2.25N。

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