Effect of crystalline quality of diamond film to the propagation loss of surface acoustic wave devices

Fujii S.; Shikata S.; Uemura T.; Nakahata H.; Harima H.

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Effect of crystalline quality of diamond film to the propagation loss of surface acoustic wave devices

机译：金刚石膜的结晶质量对声表面波器件传播损耗的影响

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Diamond films with various crystal qualities were grown by chemical vapor deposition on silicon wafers. Their crystallinity was characterized by Raman scattering and electron backscattering diffraction. By fabricating a device structure for surface acoustic wave (SAW) using these diamond films, the propagation loss was measured at 1.8 GHz arid compared with the crystallinity. It was found that the propagation loss was lowered in relatively degraded films having small crystallites, a narrow distribution in the diamond crystallite size, and preferential grain orientation. This experiment clarifies diamond film characteristics required for high-frequency applications in SAW filters.

机译：通过化学气相沉积在硅片上生长具有各种晶体质量的金刚石膜。它们的结晶度通过拉曼散射和电子反向散射衍射来表征。通过使用这些金刚石薄膜制造表面声波（SAW）的器件结构，可以在1.8 GHz以及与结晶度相比的情况下测量传播损耗。已经发现，在具有较小的微晶，金刚石微晶尺寸的分布较窄以及优先的晶粒取向的相对退化的膜中，传输损耗降低了。该实验阐明了SAW滤波器中高频应用所需的金刚石薄膜特性。

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《IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control》 |2005年第10期|p.1817-1822|共6页
作者
Fujii S.; Shikata S.; Uemura T.; Nakahata H.; Harima H.;
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正文语种 eng
中图分类声学工程;计量学;
关键词
Raman spectra; acoustic wave propagation; chemical vapour deposition; diamond; electron backscattering; grain size; high-frequency effects; surface acoustic wave devices; thin films; 1.8 GHz; C; Raman scattering; Si; chemical vapor deposition; diamond film; electron ba;

机译：拉曼光谱;声波传播;化学气相沉积;金刚石;电子反向散射;粒度;高频效应;声表面波器件;薄膜;1.8 GHz;C;拉曼散射;硅;化学气相沉积;金刚石膜;电子BA;

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机译：声表面波器件的传播损耗与二氧化硅膜特性之间的相关性
2. Development of low loss and high Q value diamond surface acoustic wave (SAW) devices consisting of fine-grained diamond [J] . Tomoki Uemura, Satoshi Fujii, Katsuhiro Itakura, SEIテクニカルレビュ－ . 2002,第160期

机译：开发低损耗，高Q值的金刚石表面声波（SAW）装置，该装置由细晶粒金刚石组成
3. Development of low loss and high Q value diamond surface acoustic wave (SAW) devices consisting of fine-grained diamond [J] . Tomoki Uemura, Satoshi Fujii, Katsuhiro Itakura, SEIテクニカルレビュ－ . 2002,第160期

机译：由细粒钻石组成的低损耗和高Q值金刚石表面声波（SAW）器件的开发
4. Acoustic loss mechanism in silicon dioxide films for temperature compensated surface acoustic wave devices [C] . Matsuda S., Miura M., Matsuda T., IEEE International Ultrasonics Symposium . 2013

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5. Materials and device modeling of zinc oxide/diamond/silicon structures for surface acoustic wave devices. [D] . Hachigo, Akihiro. 1997

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6. Microfluidics based on ZnOanocrystalline diamond surface acoustic wave devices [O] . Y. Q. Fu, L. Garcia-Gancedo, H. F. Pang, 2012

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7. Highly c-oriented LiNbO3 films on polycrystalline diamond substrate for high frequency surface acoustic wave devices [O] . Lam HK, Dai JY, Chan HLW 2004

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8. PREPARATION AND FABRICATION OF CRYSTALLINE MATERIALS FOR USE AS SURFACE ACOUSTIC WAVE DEVICES [R] . S. A. Kulin, E. P. Warekois 1974

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Effect of crystalline quality of diamond film to the propagation loss of surface acoustic wave devices

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