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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Calibration of Curie temperatures for LiTaO/sub 3/ single crystals by the LFB ultrasonic material characterization system
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Calibration of Curie temperatures for LiTaO/sub 3/ single crystals by the LFB ultrasonic material characterization system

机译：通过LFB超声材料表征系统校准LiTaO / sub 3 /单晶的居里温度

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摘要

The line-focus-beam ultrasonic material characterization (LFB-UMC) system is applied to a standardized comparison and evaluation of the Curie temperatures, T/sub C/, exclusively used in evaluating the chemical compositions of commercial LiTaO/sub 3/ crystals by measuring the velocities of Rayleigh-type leaky surface acoustic waves (LSAWs), V/sub LSAW/. We measured V/sub LSAW/ and T/sub C/ (standardized) under the same T/sub C/ measurement conditions for 36/spl deg/Y X-LiTaO/sub 3/ single-crystal wafers produced by four manufacturers and related the results to the T/sub C/ (individual) measured by the individual manufacturers. The relationships between V/sub LSAW/ and T/sub C/ (individual) varied from one company to another, and a single straight line of the proportional relationship between V/sub LSAW/ and T/sub C/ (standardized) was obtained for all wafers regardless of the manufacturer. These experimental results clarify that the problem associated with T/sub C/ measurements lies in the measurement conditions and the absolute accuracy of the measurement instruments. Measurements of the center frequencies of SH-type surface acoustic wave (SAW) filter devices are compared with V/sub LSAW/ measurements. A method of calibrating T/sub C/ using this ultrasonic system is proposed to establish standardized specifications of SAW-device crystal wafers.
机译：线聚焦束超声材料表征（LFB-UMC）系统用于居里温度T / sub C /的标准化比较和评估，专门用于评估商用LiTaO / sub 3 /晶体的化学成分，测量瑞利型泄漏表面声波（LSAW）的速度，V / sub LSAW /。我们在相同的T / sub C /测量条件下测量了V / sub LSAW /和T / sub C /（标准化），测量了四个制造商生产的36 / spl deg / Y X-LiTaO / sub 3 /单晶晶片及相关产品结果由各个制造商测得的T / sub C /（个人）。 V / sub LSAW /和T / sub C /（个体）之间的关系因一家公司而异，并且获得了V / sub LSAW /和T / sub C /（标准化）之间的比例关系的一条直线无论制造商如何，都适用于所有晶圆。这些实验结果表明，与T / sub C /测量相关的问题在于测量条件和测量仪器的绝对精度。将SH型表面声波（SAW）滤波器设备的中心频率测量值与V / sub LSAW /测量值进行比较。提出了使用该超声系统校准T / sub C /的方法，以建立SAW器件晶体晶片的标准化规格。

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