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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >High velocity SAW using aluminum nitride film on unpolished nucleation side of free-standing CVD diamond
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High velocity SAW using aluminum nitride film on unpolished nucleation side of free-standing CVD diamond

机译：在独立式CVD金刚石的未抛光成核侧使用氮化铝膜进行高速SAW

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摘要

High performances surface acoustic wave (SAW) filters based on aluminium nitride (AlN)/diamond layered structure have been fabricated. The C-axis oriented aluminum nitride films with various thicknesses were sputtered on unpolished nucleation side of free-standing polycrystalline chemical vapor deposition (CVD) diamond obtained by silicon substrate etching. Experimental results show that high order modes as well as Rayleigh waves are excited. Experimental results are in good agreement with the theoretical dispersion curves determined by software simulation with Green's function formalism. We demonstrate that high phase velocity first mode wave (so-called Sezawa wave) with high electromechanical coupling coefficient are obtained on AlN/diamond structure. This structure also has a low temperature coefficient of frequency (TCF), and preliminary results suggest that a zero TCF could be expected.
机译：已经制造出基于氮化铝（AlN）/金刚石层状结构的高性能表面声波（SAW）滤波器。将各种厚度的C轴取向氮化铝膜溅射在通过硅基板蚀刻获得的独立式多晶化学气相沉积（CVD）金刚石的未抛光成核侧。实验结果表明，高阶模态以及瑞利波均被激发。实验结果与格林函数形式主义通过软件仿真确定的理论弥散曲线非常吻合。我们证明了在AlN /金刚石结构上获得了具有高机电耦合系数的高相速度第一模式波（所谓的Sezawa波）。这种结构还具有较低的频率温度系数（TCF），初步结果表明可以预期TCF为零。

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