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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Characterization of MEMS transducer performance using near-field scanning interferometry
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Characterization of MEMS transducer performance using near-field scanning interferometry

机译：使用近场扫描干涉法表征MEMS换能器的性能

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摘要

Sophisticated ultrasonic transducer microarrays based on micro-electro-mechanical-systems (MEMS) technologies are quickly becoming a reality. A current challenge for many researchers is characterizing the dynamic performance of these and other micro-mechanical devices. In this work, the performance characteristics of a MEMS ultrasonic transducer array were successfully measured using a scanning heterodyne interferometer system. The dynamic response of the entire transducer array was measured, and the results were compared with theoretical predictions. Individual elements were found to vibrate with Bessel-like displacement patterns, and they were resonant at approximately 4 MHz. The full array showed variations in peak out-of-plane displacement levels across the device of /spl sim/16%, and isolated elements that were dramatically over-responsive and under-responsive. The measured variations across the array may have an undesirable impact on the performance of the transducer and its radiated field.
机译：基于微机电系统（MEMS）技术的精密超声换能器微阵列正迅速成为现实。许多研究人员当前面临的挑战是表征这些和其他微机械设备的动态性能。在这项工作中，使用扫描外差干涉仪系统成功测量了MEMS超声换能器阵列的性能特征。测量了整个换能器阵列的动态响应，并将结果与​​理论预测值进行了比较。发现各个元素都以贝塞尔样的位移模式振动，并且它们在大约4 MHz处共振。整个阵列显示了跨/ spl sim / 16％的设备的峰外平面位移水平的变化，以及孤立的元件，这些元件的响应过度和响应不足。整个阵列上测得的变化可能会对换能器的性能及其辐射场产生不良影响。

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