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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Capacitive micromachined ultrasonic transducers: next-generation arrays for acoustic imaging?
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Capacitive micromachined ultrasonic transducers: next-generation arrays for acoustic imaging?

机译：电容式微加工超声换能器：用于声成像的下一代阵列？

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摘要

Piezoelectric materials have dominated the ultrasonic transducer technology. Recently, capacitive micromachined ultrasonic transducers (CMUTs) have emerged as an alternative technology offering advantages such as wide bandwidth, ease of fabricating large arrays, and potential for integration with electronics. The aim of this paper is to demonstrate the viability of CMUTs for ultrasound imaging. We present the first pulse-echo phased array B-scan sector images using a 128-element, one-dimensional (1-D) linear CMUT array. We fabricated 64- and 128-element 1-D CMUT arrays with 100% yield and uniform element response across the arrays. These arrays have been operated in immersion with no failure or degradation in performance over the time. For imaging experiments, we built a resolution test phantom roughly mimicking the attenuation properties of soft tissue. We used a PC-based experimental system, including custom-designed electronic circuits to acquire the complete set of 128×128 RF A-scans from all transmit-receive element combinations. We obtained the pulse-echo frequency response by analyzing the echo signals from wire targets. These echo signals presented an 80% fractional bandwidth around 3 MHz, including the effect of attenuation in the propagating medium. We reconstructed the B-scan images with a sector angle of 90 degrees and an image depth of 210 mm through offline processing by using RF beamforming and synthetic phased array approaches. The measured 6-dB lateral and axial resolutions at 135 mm depth were 0.0144 radians and 0.3 mm, respectively. The electronic noise floor of the image was more than 50 dB below the maximum mainlobe magnitude. We also performed preliminary investigations on the effects of crosstalk among array elements on the image quality. In the near field, some artifacts were observable extending out from the array to a depth of 2 cm. A tail also was observed in the point spread function (PSF) in the axial direction, indicating the existence of crosstalk. The relative amplitude of this tail with respect to the mainlobe was less than -20 dB.
机译：压电材料主导了超声换能器技术。近来，电容微加工超声换能器（CMUT）作为一种替代技术出现了，它具有诸如宽带宽，易于制造大型阵列以及与电子产品集成的潜力等优点。本文的目的是演示用于超声成像的CMUT的可行性。我们介绍了使用128元素，一维（1-D）线性CMUT阵列的第一脉冲回波相控阵B扫描扇区图像。我们制造了64和128元素的一维CMUT阵列，具有100％的良率，并且整个阵列的元素响应均一。这些阵列在浸没状态下运行，随着时间的流逝没有性能下降或性能下降。对于成像实验，我们构建了一个分辨率测试体模，该体模大致模拟了软组织的衰减特性。我们使用了基于PC的实验系统，包括定制设计的电子电路，以从所有发射-接收元件组合中获取完整的128×128 RF A扫描集。通过分析来自导线目标的回波信号，我们获得了脉冲回波频率响应。这些回波信号在3 MHz附近呈现80％的分数带宽，包括传播介质中的衰减效应。通过使用RF波束成形和合成相控阵方法，通过离线处理，我们重建了90度扇形角和210毫米图像深度的B扫描图像。在135 mm深度处测得的6 dB横向和轴向分辨率分别为0.0144弧度和0.3 mm。图像的电子本底噪声比最大主瓣幅度低50 dB以上。我们还对阵列元素之间的串扰对图像质量的影响进行了初步研究。在近场中，可以观察到一些伪像从阵列延伸到2 cm的深度。在轴向的点扩散函数（PSF）中也观察到一条尾巴，表明存在串扰。该尾部相对于主瓣的相对幅度小于-20 dB。

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