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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Thermal effects in scanning acoustic microscopy for fine resolution applications
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Thermal effects in scanning acoustic microscopy for fine resolution applications

机译：扫描声学显微镜中的热效应，适用于高分辨率应用

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摘要

A novel scanning acoustic microscopy technique for achieving high resolution acoustic images by employing thermal effects and image subtraction has been studied and demonstrated. Experiments were performed on a perspex block patterned with a machined grid on the reverse surface, and on a buried channel in similar material. If was found that using the image subtraction technique, short periods of sample heating can lead to a stronger pattern selectivity, because of the strong temperature dependency of the elastic parameters of the polymer. In previous SAM techniques improvement in signal has been achieved through the use of special liquids as acoustic coupling media between the acoustic lens and the sample. The reported technique retains water as the coupling medium and the acoustic impedance matching is performed by varying the elastic parameters of the sample itself through direct heating. The temperature increase in the sample decreases the velocity of propagation of acoustic waves in the solid, and brings the acoustic impedance close to that of water. A theoretical model, including expressions for the acoustic aberrations, depth dependence and acoustic impedance matching has been derived. Examples of the results obtained are presented.
机译：研究和展示了一种新颖的扫描声学显微镜技术，该技术通过利用热效应和图像相减来获得高分辨率的声学图像。在有机玻璃块上进行了实验，该有机玻璃块的背面带有机械加工的网格，并在类似材料的掩埋通道上形成了图案。如果发现使用图像减影技术，由于聚合物弹性参数对温度的依赖性强，短时间的样品加热会导致较强的图案选择性。在先前的SAM技术中，通过使用特殊的液体作为声透镜与样品之间的声耦合介质，可以改善信号。报道的技术将水保留为耦合介质，并且通过直接加热来改变样品本身的弹性参数来进行声阻抗匹配。样品中的温度升高会降低声波在固体中的传播速度，并使声阻抗接近于水。推导了一个理论模型，包括声像差，深度依赖性和声阻抗匹配的表达式。给出了获得的结果的例子。

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