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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >A dual-mode thickness-shear quartz pressure sensor
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A dual-mode thickness-shear quartz pressure sensor

机译：双模式厚度剪切石英压力传感器

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摘要

The development of a dual-mode thickness-shear quartz pressure sensor to meet the demanding performance requirements of oil-field applications is discussed. The objective was to develop a sensor with an operating pressure range of 0-103.42 MPa (0.15 000 lb/in/sup 2/), a temperature range of -10 to +175 degrees C, a pressure calibration accuracy of 6894.8 Pa (1 lb/in/sup 2/), and resolution of 68.95 Pa (0.01 lb/in/sup 2/) with 1-s counter gate time. Doubly rotated cuts with piezoelectric coupling to both the C-modes of vibration were investigated. A theoretical study and general design considerations in the development of such sensors are described. Experimental results were obtained for two sensor designs: one uses a cylindrical design with the SBTC-cut, and the other, called SPA, is a special resonator design vibrating around 5 MHz without any activity dips. Pressure sensitivity of approximately 145 Hz/MPa (1 Hz/lb/in/sup 2/) at 175 degrees C is obtained. Laboratory evaluation of the static and dynamic performances is discussed for the prototypes based on the SPA design.
机译：讨论了开发双模式厚度剪切石英压力传感器以满足油田应用对性能的苛刻要求。目的是开发一种传感器，其工作压力范围为0-103.42 MPa（0.15 000 lb / in / sup 2 /），温度范围为-10至+175摄氏度，压力校准精度为6894.8 Pa（1磅/英寸/ sup 2 /），分辨率为68.95 Pa（0.01磅/英寸/ sup 2 /），计数器门控时间为1秒。研究了压电耦合到两种振动模式的双旋转切口。描述了这种传感器的开发过程中的理论研究和一般设计注意事项。获得了两种传感器设计的实验结果：一种使用带有SBTC切口的圆柱形设计，另一种称为SPA，是一种特殊的谐振器设计，它在5 MHz左右振动，没有任何活性下降。在175摄氏度下获得大约145 Hz / MPa（1 Hz / lb / in / sup 2 /）的压力灵敏度。讨论了基于SPA设计的原型的静态和动态性能的实验室评估。

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