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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >A Boundary Element Model for CMUT-Arrays Loaded by a Viscoelastic Medium
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A Boundary Element Model for CMUT-Arrays Loaded by a Viscoelastic Medium

机译：粘弹性介质加载CMUT阵列的边界元模型

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摘要

This work is an extension of a model previously developed by our group to simulate the electroacoustic response of capacitive micromachined ultrasonic transducer (CMUT)-based linear arrays acoustically loaded by a fluid medium. The goal is to introduce the viscoelasticity effects of the propagation medium into the modeling. These effects are mainly due to the passivation layer used to protect the transducer, i.e., a silicon polymer, a few hundred micrometers thick. The passivation layer is also required to ensure good acoustic coupling between the transducer front face and human skin. The theoretical approach relies on the determination of a new boundary matrix to simulate the acoustic coupling between the CMUT array and the viscoelastic medium. The complete numerical implementation of a 3-D Green's function for a viscoelastic half-space is hence described. In order to reduce computing time, an optimization was carried out through vectorization and parallelization methods. A comparison is then performed with the analytical solutions, from the literature, obtained for elastic half-space. An experimental validation of shear viscosity effects is performed through electrical impedance measurements of the CMUT linear arrays loaded by oils of varying viscosity. A very good agreement is obtained, showing that the model correctly takes the shear viscosity effects on the mechanical response of the CMUT into account, i.e., a shift in the resonance frequency and a diminution in the mechanical quality factor are observed.
机译：这项工作是先前由我们的组开发的模型的扩展，以模拟电容式微机械超声换能器（CMUT）的电声反应被流体介质加载的基于机动加载的基于线性阵列。目标是将传播媒体的粘弹性效应引入到模型中。这些效果主要是由于用于保护换能器的钝化层，即硅聚合物，厚的几百微米。还需要钝化层以确保换能器前面和人体皮肤之间的良好声学耦合。理论方法依赖于确定新界矩阵的确定模拟CMUT阵列和粘弹性介质之间的声学​​耦合。因此，描述了三维绿色空间的三维绿色功能的完整数值实现。为了降低计算时间，通过矢量化和并行化方法进行优化。然后利用用于弹性半空间的文献的分析溶液进行比较。通过由不同粘度的油装载的CMUT线性阵列的电阻抗测量来进行剪切粘度效应的实验验证。获得了非常好的协议，表明模型正确地将剪切粘度效应对CMUT考虑的机械响应，即，观察到在机械质量因子中的谐振频率和减速。

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