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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Total-Focus Ultrasonic Imaging of Defects in Solids Using a PZT Piezoelectric Micromachined Ultrasonic Transducer Array
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Total-Focus Ultrasonic Imaging of Defects in Solids Using a PZT Piezoelectric Micromachined Ultrasonic Transducer Array

机译：使用PZT压电微机械超声换能器阵列的固体缺陷的全聚焦超声成像

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摘要

This work demonstrates the ultrasonic imaging ability of piezoelectric micromachined ultrasonic transducer (PMUT) for the detection of defects deep in solids by total-focus imaging algorithm. The 3-MHz PMUT array uses thin-film PZT as thematerial for energy transformation because of its high piezoelectric coefficient. Six columns with 12 PMUT units each exhibit an acoustic pressure of 137 kPa measured in water at 1 cm away when driven by a 27-V-pp input. Butter is chosen experimentally as the coupling agent to solids because of its lownoise level and short cycling down. Through multilevel processing of echoes and total-focus algorithm, the 2-D image of a graphite plant was obtained with four holes identified based on our customized impedance-matched imaging system. The 16 columns of PMUT array with an area of 5.8 mm x 4.2 mm exhibit the imaging ability of an area of 40 mm x 40 mm in the graphite plant with identified defects deep as 3 cm. These results indicate that PMUT has the detection and imaging ability for defects deep in solids, not merely surface within hundreds of micrometers, and it has the potential for 3-D imaging, especially those occasions in limited space.
机译：这项工作展示了压电微机械超声换能器（PMUT）对通过全聚焦成像算法检测固体深缺陷的超声成像能力。由于其高压电系数，3 MHz Pmut阵列使用薄膜PZT作为电能变换的一形式。具有12个PMOT单元的六个柱各自在通过27-V-PP输入驱动时，在水中在水中测量的1厘米处测量的1厘米的声压。由于其鳞片状水平和短暂的循环，将黄油作为偶联剂作为偶联剂选择为固体。通过对回波的多级处理和全焦点算法，利用基于我们定制阻抗匹配的成像系统识别的四个孔获得石墨工厂的2-D图像。面积为5.8mm×4.2mm的16柱，面积为5.8mm×4.2mm，图形工厂中的面积为40mm×40mm的成像能力，鉴定缺陷深度为3厘米。这些结果表明，PMOT具有缺陷的固体缺陷的检测和成像能力，而不仅仅是数百微米内的表面，而且具有3-D成像的可能性，特别是在有限空间中的那些场合。

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  • 来源
  • 作者

    Ji Weiliang; Liu Lifang; Xing Zhanqiang; Zhang Derong; Wang Yicheng; Chen Lin; Chen Yu; Sun Xiangyu; Du Yijia;

  • 作者单位

    China Acad Engn Phys Microsyst & Terahertz Res Ctr Chengdu 610200 Peoples R China|China Acad Engn Phys Inst Elect Engn Mianyang 621999 Sichuan Peoples R China;

    China Acad Engn Phys Microsyst & Terahertz Res Ctr Chengdu 610200 Peoples R China|China Acad Engn Phys Inst Elect Engn Mianyang 621999 Sichuan Peoples R China;

    China Acad Engn Phys Microsyst & Terahertz Res Ctr Chengdu 610200 Peoples R China|China Acad Engn Phys Inst Elect Engn Mianyang 621999 Sichuan Peoples R China;

    Univ Elect Sci & Technol China Sch Life Sci & Technol Chengdu 610000 Peoples R China;

    China Acad Engn Phys Microsyst & Terahertz Res Ctr Chengdu 610200 Peoples R China|China Acad Engn Phys Inst Elect Engn Mianyang 621999 Sichuan Peoples R China;

    Univ Elect Sci & Technol China Sch Life Sci & Technol Chengdu 610000 Peoples R China;

    China Acad Engn Phys Microsyst & Terahertz Res Ctr Chengdu 610200 Peoples R China|China Acad Engn Phys Inst Elect Engn Mianyang 621999 Sichuan Peoples R China;

    China Acad Engn Phys Microsyst & Terahertz Res Ctr Chengdu 610200 Peoples R China|China Acad Engn Phys Inst Elect Engn Mianyang 621999 Sichuan Peoples R China;

    China Acad Engn Phys Microsyst & Terahertz Res Ctr Chengdu 610200 Peoples R China|China Acad Engn Phys Inst Elect Engn Mianyang 621999 Sichuan Peoples R China;

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  • 正文语种 eng
  • 中图分类
  • 关键词

    Imaging; Acoustics; Solids; Sensitivity; Ultrasonic transducers; Sonar equipment; Pressure measurement; Imaging; nondestructive testing (NDT); piezoelectric ultrasonic transducer; solids coupling; total-focus algorithm;

    机译：影像;声学;固体;敏感性;超声换能器;声纳设备;压力测量;成像;无损检测（NDT）;压电超声换能器;固体耦合;总耦合算法;

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