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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Micromachined High Frequency 1–3 Piezocomposite Transducer Using Picosecond Laser
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Micromachined High Frequency 1–3 Piezocomposite Transducer Using Picosecond Laser

机译：使用PICOSecond激光的微机械研磨的高频1-3压电复合换能器

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摘要

In this article, a PZT/Epoxy 1-3 piezoelectric composite based on picosecond laser etching technology is developed for the fabrication of high-frequency ultrasonic transducer. The design, fabrication, theoretical analysis, and performance of the piezocomposite and transducer are presented and discussed. According to the test results, the area of the PZT pillar is 20.5 mu m x 20.5 mu m, the average width of the kerf is 4.5 mu m, and the thickness of the piezocomposite is 38 mu m. The fabricated 1-3 piezocomposite has a resonant frequency of 46.5 MHz, a parallel resonant frequency of 65 MHz, and an electromechanical coupling coefficient of 0.73. According to the wires phantom imaging, its imaging resolution can reach 50 mu m. This study shows that the proposed picosecond laser micromachining technique can be applied in the fabrication of high frequency 1-3 piezocomposite and transducer.
机译：在本文中，开发了基于PICOSECOND激光蚀刻技术的PZT /环氧1-3压电复合材料，用于制造高频超声换能器。 提出和讨论了压电复合材料和换能器的设计，制造，理论分析和性能。 根据测试结果，PZT柱的面积为20.5μm×20.5μmm，kerf的平均宽度为4.5μm，压电复合材料的厚度为38μm。 制造的1-3压电复合材料具有46.5MHz的谐振频率，平行谐振频率为65MHz，机电耦合系数为0.73。 根据电线幻影成像，其成像分辨率可以达到50μm。 本研究表明，所提出的PICOSECOND激光微加工技术可以应用于高频1-3压电复合材料和换能器的制造。

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  • 作者

    Xu Jie; Han Zhile; Wang Ninghao; Li Zhangjian; Lv Jiabing; Zhu Xinle; Cui Yaoyao; Jian Xiaohua;

  • 作者单位

    Fudan Univ Acad Engn & Technol Shanghai 200433 Peoples R China|Chinese Acad Sci Suzhou Inst Biomed Engn & Technol Suzhou 215163 Peoples R China;

    Fudan Univ Acad Engn & Technol Shanghai 200433 Peoples R China|Chinese Acad Sci Suzhou Inst Biomed Engn & Technol Suzhou 215163 Peoples R China;

    Chinese Acad Sci Suzhou Inst Biomed Engn & Technol Suzhou 215163 Peoples R China;

    Chinese Acad Sci Suzhou Inst Biomed Engn & Technol Suzhou 215163 Peoples R China;

    Chinese Acad Sci Suzhou Inst Biomed Engn & Technol Suzhou 215163 Peoples R China;

    Chinese Acad Sci Suzhou Inst Biomed Engn & Technol Suzhou 215163 Peoples R China;

    Chinese Acad Sci Suzhou Inst Biomed Engn & Technol Suzhou 215163 Peoples R China;

    Chinese Acad Sci Suzhou Inst Biomed Engn & Technol Suzhou 215163 Peoples R China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    1-3 piezocomposite; high frequency transducer; picosecond laser;

    机译：1-3压电复合材料;高频换能器;皮秒激光;

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