A Multimode Transverse Dynamic Force Microscope—Design, Identification, and Control

Zhang Kaiqiang; Hatano Toshiaki; Herrmann Guido; Antognozzi Massimo; Edwards Chirstopher; Thang Tien Nguyen; Burgess Stuart C.; Miles Mervyn

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A Multimode Transverse Dynamic Force Microscope—Design, Identification, and Control

机译：多模横向动态力显微镜 - 设计，识别和控制

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The transverse dynamic force microscope (TDFM) and its shear force sensing principle permit true noncontact force detection in contrast to typical atomic force microscopes. The two TDFM measurement signals for the cantilever allow, in principle, two different scanning modes of which, in particular, the second presented here permits a full-scale noncontact scan. Previous research work mainly focused on developing the sensing mechanism, whereas this paper investigates the vertical axis dynamics for advanced robust closed-loop control. This paper presents a new TDFM digital control solution, built on field-programmable gate array equipment running at high implementation frequencies. The integrated control system allows the implementation of online customizable controllers, and raster scans in two modes at very high detection bandwidth and nanoprecision. Robust control algorithms are designed, implemented, and practically assessed. The two realized scanning modes are experimentally evaluated by imaging nanospheres with known dimensions in wet conditions.

机译：横向动态力显微镜（TDFM）及其剪切力传感原理允许与典型的原子力显微镜相比，真正的非接触力检测。用于悬臂的两个TDFM测量信号原则上允许两种不同的扫描模式，特别是其这里呈现的第二种扫描模式允许满量程的非接触扫描。以前的研究工作主要集中在开发传感机制上，而本文调查了先进的稳健闭环控制的垂直轴动态。本文提出了一种新的TDFM数字控制解决方案，内置于高实现频率下运行的现场可编程门阵列设备。集成控制系统允许在非常高的检测带宽和纳频度下实现在线可定制的控制器和光栅扫描。设计，实现和实际评估强大的控制算法。通过在潮湿条件下成像纳米尺寸的成像纳米体进行实验评估两种实现的扫描模式。

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《IEEE Transactions on Industrial Electronics》 |2020年第6期|4729-4740|共12页
作者
Zhang Kaiqiang; Hatano Toshiaki; Herrmann Guido; Antognozzi Massimo; Edwards Chirstopher; Thang Tien Nguyen; Burgess Stuart C.; Miles Mervyn;
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作者单位

Univ Bristol Mech Engn Dept Bristol BS8 1TR Avon England;

Univ Bristol Bristol BS8 1TR Avon England|Hitachi Hitachi R&D Hitachinaka Ibaraki 3120034 Japan;

Univ Bristol Mech Engn Dept Bristol BS8 1TR Avon England|Univ Manchester Dept Elect & Elect Engn Manchester M13 9PL Lancs England;

Univ Bristol Sch Phys Bristol BS8 1TL Avon England;

Univ Exeter Exeter EX4 4SB Devon England;

Univ Exeter Exeter EX4 4SB Devon England|Ton Duc Thang Univ Fac Elect & Elect Engn Modeling Evolutionary Algorithms Simulat & Artifi Ho Chi Minh City 756636 Vietnam;

Univ Bristol Mech Engn Dept Bristol BS8 1TR Avon England;

Univ Bristol Sch Phys Bristol BS8 1TL Avon England;

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正文语种 eng
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关键词
Sensors; Probes; Field programmable gate arrays; Oscillators; Force; Microscopy; Bandwidth; Control arithmetic optimization; fixed-point implementation; nanoprecision control; scanning-probe microscopy;

机译：传感器;探针;现场可编程门阵列;振荡器;力;显微镜;带宽;控制算术优化;固定点实施;纳费密控制;扫描探针显微镜;

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专利

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机译：不确定原子力显微镜系统动力学分析与模糊逻辑控制器设计
2. An optimized nano-positioning stage for Bristol’s Transverse Dynamic Force Microscope [J] . G. De Silva, S.C. Burgess, T. Hatano, IFAC PapersOnLine . 2016,第21期

机译：布里斯托尔横向动态力显微镜的优化纳米定位平台
3. An optimized nano-positioning stage for Bristol’s Transverse Dynamic Force Microscope [J] . G. De Silva, S.C. Burgess, T. Hatano, IFAC PapersOnLine . 2016,第21期

机译：布里斯托尔横向动态力显微镜的优化纳米定位平台
4. Adaptive estimation of the shear force in the cantilever dynamics of the Transverse Dynamic Force Microscope [C] . Thang Nguyen, Edwards C., Herrmann G., IEEE International Symposium on Intelligent Control;IEEE Multi-conference on Systems and Control . 2014

机译：横向动力显微镜的悬臂动力学中剪切力的自适应估计
5. Dynamical analysis and application of advanced control techniques to atomic force microscopes and camless engines. [D] . Ashhab, (Moh'd Sami) Shafiq. 1998

机译：动力学分析和先进控制技术在原子力显微镜和无凸轮发动机上的应用。
6. Transverse spin forces and non-equilibrium particle dynamics in a circularly polarized vacuum optical trap [O] . V. Svak, O. Brzobohatý, M. Šiler, -1

机译：圆偏振真空光阱中的横向自旋力和非平衡粒子动力学
7. A Multimode Transverse Dynamic Force Microscope—Design, Identification, and Control [O] . Kaiqiang Zhang, Toshiaki Hatano, Guido Herrmann, 2020

机译：多模横向动态力显微镜 - 设计，识别和控制

A Multimode Transverse Dynamic Force Microscope—Design, Identification, and Control

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