Event-Triggered Adaptive Control Design With Prescribed Performance for Macro–Micro Composite Positioning Stage

Chen Xun; Liu Yang; Zhang Lanyu; Gao Jian; Yang Bin; Chen Xin

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Event-Triggered Adaptive Control Design With Prescribed Performance for Macro–Micro Composite Positioning Stage

机译：事件触发的自适应控制设计，具有宏观微型复合定位级的规定性能

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摘要

This article investigates the rapid vibration reduction problem for macro-micro composite positioning stage (MMCPS), which is of great engineering significance for microelectronics manufacturing. The MMCPS is modeled as a nonstrict feedback interconnected nonlinear system. Based on backstepping technique and radial basis function neural networks, an event-triggered adaptive control scheme with prescribed performance is developed. By designing performance function and coordinate transformation, the expected state convergence rate and precision are obtained. The relative threshold event-triggering mechanism is adopted to decrease the update frequency of control input. It is proved that all signals of the closed-loop system are semiglobally uniformly ultimately bounded. Finally, the simulation results are conducted to illustrate the effectiveness of the control algorithm.

机译：本文研究了宏观微型复合定位阶段（MMCP）的快速减振问题，对微电子制造具有巨大的工程意义。 MMCP被建模为非防盗反馈互连的非线性系统。基于BackStepping技术和径向基函数神经网络，开发了一种具有规定性能的事件触发的自适应控制方案。通过设计性能函数和坐标转换，获得了预期的状态收敛速率和精度。采用相对阈值事件触发机制来降低控制输入的更新频率。事实证明，闭环系统的所有信号都是半球形均匀的最终限定的。最后，进行仿真结果以说明控制算法的有效性。

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来源
《IEEE Transactions on Industrial Electronics》 |2021年第10期|9963-9971|共9页
作者
Chen Xun; Liu Yang; Zhang Lanyu; Gao Jian; Yang Bin; Chen Xin;
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作者单位

Guangdong Univ Technol Minist Educ Key Lab Precis Microelect Mfg Technol & Equipment Guangzhou 510006 Peoples R China;

Guangdong Univ Technol Sch Automat Guangzhou 510006 Peoples R China|Guangdong Univ Technol Guangdong Prov Key Lab Intelligent Decis & Cooper Guangzhou 510006 Peoples R China;

Guangdong Univ Technol Minist Educ Key Lab Precis Microelect Mfg Technol & Equipment Guangzhou 510006 Peoples R China;

Guangdong Univ Technol Minist Educ Key Lab Precis Microelect Mfg Technol & Equipment Guangzhou 510006 Peoples R China;

Guangdong Univ Technol Sch Automat Guangzhou 510006 Peoples R China|Guangdong Univ Technol Guangdong Prov Key Lab Intelligent Decis & Cooper Guangzhou 510006 Peoples R China;

Guangdong Univ Technol Minist Educ Key Lab Precis Microelect Mfg Technol & Equipment Guangzhou 510006 Peoples R China;

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原文格式 PDF
正文语种 eng
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关键词
Vibrations; Adaptive control; Microelectronics; Manufacturing; Force; Interconnected systems; Adaptive control; event-triggering mechanism; macro-micro composite positioning stage (MMCPS); prescribed performance;

机译：振动;自适应控制;微电子;制造;施力;互连系统;自适应控制;事件触发机制;宏观微型复合定位阶段（MMCPS）;规定的性能;

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2. Adaptive Kalman filter and dynamic recurrent neural networks-based control design of macro-micro manipulator [J] . Lijun ZHANG, Lixin YANG, Lining SUN, 控制理论与应用（英文版） . 2012,第004期
3. Relative Position and Attitude Control for Drag-Free Satellite with Prescribed Performance and Actuator Saturation [J] . TAO Jiawei, ZHANG Tao 南京航空航天大学学报（英文版） . 2019,第004期
4. Adaptive Prescribed Performance Control for Flexible Spacecraft with Input Saturation and Actuator Misalignment [J] . Jiawei Tao, Tao Zhang, Yongfang Nie 清华大学学报（英文版） . 2019,第006期
5. Event-triggered adaptive prescribed performance control of uncertain nonlinear systems with unknown control directions [J] . Zhao Nan-Nan, Ouyang Xin-Yu, Wu Li-Bing, ISA Transactions . 2021,第1期

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6. Event-triggered adaptive fixed-time NN control for constrained nonstrict-feedback nonlinear systems with prescribed performance [J] . Yang Wen, Pan Yingnan, Liang Hongjing Neurocomputing . 2021,第Jana21期

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7. Adaptive event-triggered consensus control of multi-agent systems with prescribed performance and input quantization [J] . Wang Wei, Ma Hui, Basin Michael V., International Journal of Adaptive Control and Signal Processing . 2021,第8期

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8. A Rapid PID Control Method for High-speed Macro-micro Composite Positioning Stage [C] . Yutao Tan, Jian Gao, Langyu Zhang, International Conference on Electronic Packaging Technology . 2017

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12. New Macro-Micro Approach for Modeling Adaptive Composites [R] . Chattopadhyay, A. , Thornburgh, R. P. 2002

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Event-Triggered Adaptive Control Design With Prescribed Performance for Macro–Micro Composite Positioning Stage

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