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Impurity composition of high-purity isotopically enriched monosilane and monogermane

机译：高纯度同位素富集的甲硅烷和单锗烷的杂质组成

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摘要

The impurity composition of (SiH4)-Si-28, (SiH4)-Si-29, and (SiH4)-Si-30 silanes and (GeH4)-Ge-72, (GeH4)-Ge-73, (GeH4)-Ge-74, and (GeH4)-Ge-76 germanes isotopically enriched to above 99.9 at % has been studied by gas chromatography/mass spectrometry using capillary adsorption columns. Impurities have been identified by comparing their mass spectra with NIST data and information available in the literature, and by inferring their structure from fragment ions and retention times. We have identified 53 impurity substances in silanes and 42 in germanes: permanent gases; saturated, unsaturated, halogen-containing, and aromatic C-1-C-9 hydrocarbons; their homologues; alkyl derivatives of silane and germane; chlorogermane; siloxanes; fluorosiloxanes; sulfur compounds; and dioxane. The silicon- and germanium-containing impurities have been shown to be isotopically enriched, as the major component. The detection limits of the impurities are 5 x 10(-8) to 3 x 10(-5) vol %, comparing well with the best results in the literature.
机译：（SiH4）-Si-28，（SiH4）-Si-29和（SiH4）-Si-30硅烷以及（GeH4）-Ge-72，（GeH4）-Ge-73，（GeH4）-已经通过使用毛细管吸附柱的气相色谱/质谱法研究了同位素同位素富集至99.9 at％以上的Ge-74和（GeH4）-Ge-76锗烷。通过将杂质的质谱图与NIST数据和文献中可用的信息进行比较，并通过碎片离子和保留时间推断其结构，可以鉴定出杂质。我们已经确定了硅烷中的53种杂质物质和德国人中的42种杂质：永久性气体；饱和，不饱和，含卤素和芳族的C-1-C-9烃；他们的同系物；硅烷和锗烷的烷基衍生物；氯锗烷硅氧烷;氟硅氧烷;硫化合物;和二恶烷。含硅和锗的杂质已被证明是同位素富集的主要成分。杂质的检出限为5 x 10（-8）到3 x 10（-5）体积％，与文献中的最佳结果进行了比较。

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  • 来源
    《Inorganic materials》 |2017年第1期|27-34|共8页
  • 作者

    Sozin A. Yu.; Bulanov A. D.; Churbanov M. F.; Chernova O. Yu.; Sorochkina T. G.; Nushtaeva L. B.;

  • 作者单位

    Russian Acad Sci, Devyatykh Inst Chem High Pur Subst, Ul Tropinina 49, Nizhnii Novgorod 603950, Russia;

    Russian Acad Sci, Devyatykh Inst Chem High Pur Subst, Ul Tropinina 49, Nizhnii Novgorod 603950, Russia|Lobachevsky State Univ, Pr Gagarina 23, Nizhnii Novgorod 603950, Russia;

    Russian Acad Sci, Devyatykh Inst Chem High Pur Subst, Ul Tropinina 49, Nizhnii Novgorod 603950, Russia|Lobachevsky State Univ, Pr Gagarina 23, Nizhnii Novgorod 603950, Russia;

    Russian Acad Sci, Devyatykh Inst Chem High Pur Subst, Ul Tropinina 49, Nizhnii Novgorod 603950, Russia;

    Russian Acad Sci, Devyatykh Inst Chem High Pur Subst, Ul Tropinina 49, Nizhnii Novgorod 603950, Russia;

    Russian Acad Sci, Devyatykh Inst Chem High Pur Subst, Ul Tropinina 49, Nizhnii Novgorod 603950, Russia;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    silanes; germanates; impurities;

    机译：硅烷;锗酸盐;杂质;

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