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首页> 外文期刊>International Journal of Materials Engineering Innovation >Properties of multi-walled carbon nanotubes synthesis on porous silicon by double furnace thermal-CVD technique
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Properties of multi-walled carbon nanotubes synthesis on porous silicon by double furnace thermal-CVD technique

机译：双炉热CVD技术在多孔硅上合成多壁碳纳米管的性能

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摘要

Multi-walled carbon nanotubes (MWCNs) were synthesised using double-furnace thermal chemical vapour deposition technique at 700-900℃ on porous silicon nanostructure (PSiNs). Palm oil was used as a carbon natural source, ferrocene as a catalyst and nitrogen gas as a carrier gas. The precursor were vaporised at 475℃ carried by nitrogen gas which flow at constant rate of 150 sccm/min. Carbon nanotubes (CNTs) were characterised by using Raman spectroscopy and field emission scanning electron microscopy (FESEM) to check its structure and crystallites before being tested with Ⅰ-Ⅴ probe. Au contact was used as a metal contact deposited on CNTs layer. CNTs with uniform diameter were found grown on porous silicon for each temperature used. Based on micro-Raman spectroscopy result, the peak of CNTs (around 1,300 to 1,600 nm) was detected. The Ⅰ-Ⅴ characteristic of CNTs deposited had different profile when deposited at different temperatures.
机译：利用双炉热化学气相沉积技术在多孔硅纳米结构（PSiNs）上于700-900℃合成了多壁碳纳米管（MWCNs）。棕榈油用作天然碳源，二茂铁用作催化剂，氮气用作载气。前驱体在氮气流下于475℃汽化，氮气以150 sccm / min的恒定速率流动。用拉曼光谱和场发射扫描电子显微镜（FESEM）对碳纳米管（CNTs）进行表征，然后用Ⅰ-Ⅴ探针进行测试，以检查其结构和微晶。金触点被用作沉积在CNT层上的金属触点。对于每种使用的温度，发现具有均匀直径的CNT在多孔硅上生长。基于微拉曼光谱学结果，检测到CNT的峰（约1300至1600nm）。在不同温度下沉积的CNT的Ⅰ-Ⅴ特性具有不同的分布。

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    F.S. Husairi; A.Z. Zainurul; M. Rusop; S. Abdullah;

  • 作者单位

    NANO-SciTech Centre (NST), Institute of Science, Universiti Teknologi MARA (UiTM), 40450 Shah Alam, Selangor, Malaysia, Faculty of Applied Sciences, Universiti Teknologi MARA (UiTM), 40450 Shah Alam, Selangor, Malaysia;

    NANO-SciTech Centre (NST), Institute of Science, Universiti Teknologi MARA (UiTM), 40450 Shah Alam, Selangor, Malaysia, Faculty of Applied Sciences, Universiti Teknologi MARA (UiTM), 40450 Shah Alam, Selangor, Malaysia;

    NANO-SciTech Centre (NST), Institute of Science, Universiti Teknologi MARA (UiTM), 40450 Shah Alam, Selangor, Malaysia, Faculty of Electrical Engineering, NANO-ElecTronic Centre (NET), Universiti Teknologi MARA (UiTM), 40450 Shah Alam, Selangor, Malaysia;

    NANO-SciTech Centre (NST), Institute of Science, Universiti Teknologi MARA (UiTM), 40450 Shah Alam, Selangor, Malaysia, Faculty of Applied Sciences, Universiti Teknologi MARA (UiTM), 40450 Shah Alam, Selangor, Malaysia;

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  • 正文语种 eng
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  • 关键词

    carbon nanotubes; thermal-CVD; PSiNs; Ⅰ-Ⅴ characteristics;

    机译：碳纳米管;热CVD;PSiN;Ⅰ-Ⅴ特性;

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