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首页> 外文期刊>International journal of mechanics and materials in design >Sensitivity analysis of nonlinear vibration of AFM piezoelectric microcantilever in liquid
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Sensitivity analysis of nonlinear vibration of AFM piezoelectric microcantilever in liquid

机译：AFM压电微悬臂梁在液体中非线性振动的敏感性分析

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摘要

In this paper sensitivity analysis of nonlinear vibrating motion of atomic force microscope (AFM) piezoelectric microcantilever (MC) is performed in liquid environment. With respect to the importance of resonance amplitude and system nonlinearity in AFM application, sensitivity analysis of nonlinear vibrating motion is performed on these two parameters. The sensitivity analysis is carried out based on the Sobol statistical method. Piezoelectric MC has geometrical discontinuities due to presence of piezoelectric layer and tip. Regarding these discontinuities, non-uniform beam model is chosen for the dynamic modeling. Vibrating motion of the MC is modeled in AFM non-contact mode. The sensitivity analysis is performed to study how the effective parameters affect nonlinear vibrating motion in liquid. The sensitivity analysis of piezoelectric MC in liquid was compared with the one performed in air to better specify the effect of liquid environment on motion. The obtained results show that sensitivity of piezoelectric MC to nonlinearity of interaction force in air is greater than liquid and the sensitivity decreases with the increase of liquid density. With respect to the sensitivity analysis results, it can be concluded that the most effective geometrical parameters on nonlinearity in both air and liquid environments are thickness and length of piezoelectric layer and length of tip. The results of sensitivity analysis also show that the length of probe in liquid has a considerable effect on amplitude, whereas it has less effect on amplitude in air.
机译：本文在液体环境中对原子力显微镜（AFM）压电微悬臂梁（MC）的非线性振动运动进行灵敏度分析。考虑到共振振幅和系统非线性在AFM应用中的重要性，对这两个参数进行了非线性振动运动的灵敏度分析。灵敏度分析是基于Sobol统计方法进行的。压电MC由于存在压电层和尖端而具有几何上的不连续性。对于这些不连续性，动态模型选择了非均匀梁模型。 MC的振动运动是在AFM非接触模式下建模的。进行灵敏度分析以研究有效参数如何影响液体中的非线性振动运动。将压电MC在液体中的敏感性分析与在空气中进行的敏感性进行了比较，以更好地说明液体环境对运动的影响。所得结果表明，压电MC对空气中相互作用力非线性的敏感性大于液体，并且随着液体密度的增加而降低。关于灵敏度分析结果，可以得出结论，在空气和液体环境中，关于非线性的最有效的几何参数是压电层的厚度和长度以及尖端的长度。灵敏度分析的结果还表明，液体中探头的长度对振幅的影响很大，而对空气中的振幅的影响则较小。

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