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首页> 外文期刊>International journal of mechanics and materials in design >The effect of finite electrical conductivity of small-scale beam resonators on their vibrational response under electrostatic fields
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The effect of finite electrical conductivity of small-scale beam resonators on their vibrational response under electrostatic fields

机译：小规模梁谐振器有限电导率对静电场振动响应的影响

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摘要

Electrostatic actuation is one of the most commonly used methods for excitation and measurement in micro and nanoscale resonators. In the dynamical behavior analyses of such systems, the resonating beam is often assumed to be a perfect conductor. In this paper, the effect of electrical resistivity on the vibrational response of these systems, including the natural frequency and damping, is investigated. The governing coupled nonlinear partial differential equations of motion are derived and a new finite element method formulation is presented by developing a new electromechanical element. The numerical natural frequencies are compared with experimental measurements and the achieved correlation is better than that in the prior studies. Results indicate that there is a jump in the frequency and damping of the system at a critical resistivity. As the system size decreases and the applied voltage approaches the pull-in voltage, the electrical resistivity completely dominates the response nature of the system. An experiment is also conducted, and good agreement with the theory is observed regarding the effect of electrical resistivity.
机译：静电致动是微型和纳米级谐振器中的激发和测量最常用的方法之一。在这种系统的动态行为分析中，通常认为谐振光束是完美的导体。本文研究了电阻率对这些系统的振动响应的影响，包括固有频率和阻尼。通过开发新的机电元件来提出导出运动的控制耦合非线性部分微分方程，并通过开发新的机电元件来提出新的有限元方法制剂。将数值自然频率与实验测量进行比较，并且实现的相关性优于现有研究中的相关性。结果表明，在临界电阻率下，系统的频率和阻尼存在跳跃。由于系统尺寸减小并且施加的电压接近拉线电压，电阻率完全占据了系统的响应性质。还进行了实验，并观察到电阻率的影响与该理论的良好一致。

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