Numerical simulation and design of a new microwave annular waveguide plasma source-I: Simulations without the plasma parameters

Fan Liu; Jianhua Wang; Songyuan Dai

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Numerical simulation and design of a new microwave annular waveguide plasma source-I: Simulations without the plasma parameters

机译：新型微波环形波导等离子体源的数值模拟与设计-I：无等离子体参数的模拟

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A new microwave annular waveguide plasma source with slot antennas is introduced in this paper. The distributions of electromagnetic field within the rectangular waveguide and the annular waveguide are simulated and analyzed, and the relationship between the distributions of the electromagnetic field and the radius of the microwave reactor is investigated. In addition, HFSS microwave studio simulator is applied to carry out the final design. Both analysis calculation and numerical simulation of the electromagnetic field distributions for the waveguide and microwave annular waveguide plasma source are presented and they are in good agreement.

机译：介绍了一种新型的带缝隙天线的微波环形波导等离子体源。对矩形波导和环形波导内的电磁场分布进行了模拟和分析，研究了电磁场的分布与微波反应器半径之间的关系。此外，HFSS微波工作室模拟器被用于执行最终设计。给出了波导和微波环形波导等离子体源电磁场分布的分析计算和数值模拟，两者吻合良好。

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来源
《International journal of numerical modelling》 |2011年第6期|p.526-534|共9页
作者
Fan Liu; Jianhua Wang; Songyuan Dai;
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作者单位

Institute of Plasma Physics, Academia Sinica, Hefei 230031, People's Republic of China Province Key Lab of Plasma Chemistry and Advanced Materials, School of Material Science and Engineering, Wuhan Institute of Technology, Wuhan 430073, People's Republic of China;

rnInstitute of Plasma Physics, Academia Sinica, Hefei 230031, People's Republic of China Province Key Lab of Plasma Chemistry and Advanced Materials, School of Material Science and Engineering, Wuhan Institute of Technology, Wuhan 430073, People's Republic of China;

rnInstitute of Plasma Physics, Academia Sinica, Hefei 230031, People's Republic of China;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类
关键词
microwave reactor; numerical simulation; electromagnetic field;

机译：微波反应器数值模拟电磁场;

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Numerical simulation and design of a new microwave annular waveguide plasma source-I: Simulations without the plasma parameters

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