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Scheduling dual-armed cluster tools with cleaning processes

机译：使用清洁过程安排双臂群集工具

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摘要

Modern cluster tools tend to clean the chambers each time a specified number of wafers have been processed. Such cleaning processes are intended to reduce the quality risk due to the residual chemicals within the chambers. When such cleaning processes are introduced, the conventional scheduling methods for cluster tools, such as the swap sequence for dual-armed cluster tools, are no longer effective. Therefore, we examine a cyclic scheduling problem for a dual-armed cluster tool that performs cleaning processes periodically. We first identify sufficient conditions for which the conventional backward and swap sequences give the minimum cycle time. We then develop a systematic way of generating all feasible robot task sequences, for which the cycle times can be computed. However, the number of feasible robot task sequences increases too fast to be enumerated as the cleaning cycle and the number of process steps increase. To address the complexity problem, we propose two heuristic scheduling strategies and compare them with the conventional scheduling methods and the lower bound of each schedule, respectively, to verify their effectiveness experimentally.
机译：每次处理指定数量的晶圆时，现代群集工具都倾向于清洁腔室。此类清洁工艺旨在降低由于腔室内残留化学物质而导致的质量风险。当引入此类清理过程时，用于群集工具的常规调度方法（例如，双臂群集工具的交换顺序）不再有效。因此，我们研究了周期性执行清理过程的双臂集群工具的循环调度问题。我们首先确定常规反向和交换序列给出最短循环时间的充分条件。然后，我们开发了一种系统的方式来生成所有可行的机器人任务序列，可以为其计算周期。但是，随着清洁周期和处理步骤数量的增加，可行的机器人任务序列的数量增加得太快而无法枚举。为了解决复杂性问题，我们提出了两种启发式调度策略，并将它们分别与常规调度方法和每个调度的下限进行比较，以通过实验验证其有效性。

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  • 来源
    《International Journal of Production Research》 |2013年第12期|3671-3687|共17页
  • 作者

    Heejung Kim; Hyun-Jung Kim; Jun-Ho Lee; Tae-Eog Lee;

  • 作者单位

    Department of Industrial and Systems Engineering, KAIST (Korea Advanced Institute of Science and Technology), 291 Daehak-ro,Yuseong-gu, Daejeon 305-701, Republic of Korea;

    Department of Industrial and Systems Engineering, KAIST (Korea Advanced Institute of Science and Technology), 291 Daehak-ro,Yuseong-gu, Daejeon 305-701, Republic of Korea;

    Department of Industrial and Systems Engineering, KAIST (Korea Advanced Institute of Science and Technology), 291 Daehak-ro,Yuseong-gu, Daejeon 305-701, Republic of Korea;

    Department of Industrial and Systems Engineering, KAIST (Korea Advanced Institute of Science and Technology), 291 Daehak-ro,Yuseong-gu, Daejeon 305-701, Republic of Korea;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    scheduling; semiconductor manufacture; cluster tool; cleaning process;

    机译：排程半导体制造;集群工具;清洗过程;

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