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Performance Investigation of CMM Measurement Quality Using Flick Standard

机译:使用Flick标准对CMM测量质量进行性能调查

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摘要

Quality of coordinate measuring machine (CMM) in dimension and form metrology is designed and performed at the NIS. The experimental investigation of CMM performance is developed by using reference Flick standard. The measurement errors of corresponding geometric evaluation algorithm (LSQ, ME, MC, and MI) and probe scanning speed (1, 2, 3, 4, and 5 mm/s) are obtained through repeated arrangement, comparison, and judgment. The experimental results show that the roundness error deviation can be evaluated effectively and exactly for CMM performance by using Flick standard. Some of influencing quantities for diameter and roundness form errors may dominate the results at all fitting algorithms under certain circumstances. It can be shown that the 2 mm/s probe speed gives smaller roundness error than 1,3,4, and 5 mm/s within 0.2:0.3 μm. It ensures that measurement at 2 mm/s is the best case to satisfy the high level of accuracy in the certain condition. Using Flick standard as a quality evaluation tool noted a high precision incremental in diameter and roundness form indication. This means a better transfer stability of CMM quality could be significantly improved. Moreover, some error formulae of data sets have been postulated to correlate the diameter and roundness measurements within the application range. Uncertainty resulting from CMM and environmental temperature has been evaluated and confirmed the quality degree of confidence in the proposed performance investigation.
机译:NIS负责设计和执行尺寸和形式计量方面的坐标测量机(CMM)质量。使用参考Flick标准开发了CMM性能的实验研究。通过重复排列,比较和判断,可以获得相应的几何评估算法(LSQ,ME,MC和MI)的测量误差和探针扫描速度(1、2、3、4和5 mm / s)。实验结果表明,使用Flick标准可以有效而准确地评估CMM性能的圆度误差偏差。在某些情况下,在所有拟合算法中,一些影响直径和圆度形状误差的量可能会主导结果。可以看出,在0.2:0.3μm范围内,2 mm / s的测头速度比1,3,4和5 mm / s的圆度误差小。它确保在特定条件下以2 mm / s的速度进行测量是满足高精度水平的最佳情况。使用Flick标准作为质量评估工具时,可以看到直径和圆度的高精度增量形式。这意味着可以显着提高CMM质量的更好的传输稳定性。此外,已经提出了一些数据集的误差公式,以关联应用范围内的直径和圆度测量。由CMM和环境温度引起的不确定性已得到评估,并在提议的性能研究中确认了质量可信度。

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