On MEMS Reliability and Failure Mechanisms

Daniel J. Fonseca; Miguel Sequera

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On MEMS Reliability and Failure Mechanisms

机译：MEMS的可靠性和失效机制

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Microelectromechanical systems (MEMS) are a fast-growing field in microelectronics. MEMS are commonly used as actuators and sensors with a wide variety of applications in health care, automotives, and the military. The MEMS production cycle can be classified as three basic steps: (1) design process, (2) manufacturing process, and (3) operating cycle. Several studies have been conducted for steps (1) and (2); however, information regarding operational failure modes in MEMS is lacking. This paper discusses reliability in the context of MEMS functionality. It also presents a brief review of the most relevant failure mechanisms for MEMS.

机译：微机电系统（MEMS）是微电子领域中发展迅速的领域。 MEMS通常用作致动器和传感器，在医疗保健，汽车和军事领域具有广泛的应用。 MEMS的生产周期可分为三个基本步骤：（1）设计过程，（2）制造过程和（3）操作周期。已经对步骤（1）和（2）进行了一些研究；然而，缺乏有关MEMS中的操作故障模式的信息。本文讨论了MEMS功能方面的可靠性。它还简要介绍了与MEMS最相关的故障机制。

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《International journal of quality, statistics, & reliability》 |2011年第2011期|p.11.1-11.7|共7页
作者
Daniel J. Fonseca; Miguel Sequera;
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Department of Mechanical Engineering, The University of Alabama, Tuscaloosa, Al 35487, USA;

Department of Mechanical Engineering, The University of Alabama, Tuscaloosa, Al 35487, USA;

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On MEMS Reliability and Failure Mechanisms

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