Measurement of Nano-fine Particles on Si Wafer Surface by Laser Light Scattering Method

Satoshi Sasaki; Hiroshi An; Yuzo Mori

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Measurement of Nano-fine Particles on Si Wafer Surface by Laser Light Scattering Method

机译：激光散射法测量硅片表面纳米微粒

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摘要

A new measuring method for particles of nanometer (nm)-order size on a Si (Silicon) wafer has been developed using a light-scattering method. In this method, a measuring system was developed to detect particles of nm-order size, by scanning the laser spot on the surface of a Si wafer. In this study, to improve the detection sensitivity for particle diameters, we attempted to discriminate detected voltage signals including the detected signal for particles and the measured noise signal for the surface of Si wafer on the photo multiplier tube (PMT).

机译：已经开发出一种使用光散射法测量Si（硅）晶片上纳米级（nm）级颗粒的新方法。在这种方法中，开发了一种测量系统，可通过扫描Si晶片表面上的激光点来检测纳米级尺寸的颗粒。在这项研究中，为了提高对粒径的检测灵敏度，我们试图区分检测到的电压信号，包括粒子的检测信号和光电倍增管（PMT）上的硅晶片表面的噪声信号。

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来源
《精密工学会誌》 |2001年第11期|p.1818-1823|共6页
作者
Satoshi Sasaki; Hiroshi An; Yuzo Mori;
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原文格式 PDF
正文语种 jpn
中图分类机械制造工艺;仪器、仪表;
关键词
nanometer order size; Si wafer; a light-scattering method;

机译：纳米订单尺寸;硅片光散射法;

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专利

1. Measurement of Nano-fine Particles on Si Wafer Surface by Laser Light Scattering Method [J] . Satoshi Sasaki, Hiroshi An, Yuzo Mori 精密工学会誌 . 2001,第11期

机译：激光散射法测量硅片表面纳米微粒
2. Measurement of ultra fine particles on the Si wafer surface using a laser light scattering method [J] . Haruyuki Inoue, Toshihiko Kataoka, Katsuyoshi Endo 精密工学会誌 . 1997,第8期

机译：使用激光散射法测量硅晶片表面上的超细颗粒
3. SURFACE CHARACTERISTICS OF POLYSTYRENE LATEX PARTICLES AND COMPARISON WITH STYRENE-BUTADIENE COPOLYMER LATEX PARTICLES USING DYNAMIC LIGHT SCATTERING AND ELECTROPHORETIC LIGHT SCATTERING MEASUREMENTS [J] . Zhao JX., Brown W. Journal of Colloid and Interface Science . 1996,第1期

机译：聚苯乙烯乳胶颗粒的表面特征及其与苯乙烯-丁二烯共聚物乳胶颗粒的动态光散射和电光散射测量比较
4. PARTICLE SIZING AND COUNTING USING A NEW LASER LIGHT SCATTERING DETECTION TECHNIQUE ON SILICON WAFER SURFACES [C] . Jose Candido de Souza Filho, Sebastiao Gomes dos Santos Filho Proceedings vol.2005-08; International Symposium on Microelectronics Technology and Devices(SBMICRO 2005); 200509; . 2005

机译：在硅晶片表面上使用新型激光散射检测技术进行颗粒尺寸计算
5. MEASUREMENTS OF LOW AND ULTRALOW INTERFACIAL TENSION BY MEANS OF THE BLADE, SPINNING DROP, PENDANT DROP AND LASER LIGHT SCATTERING METHODS. [D] . JON, DOMINGO INOCENCIO. 1986

机译：通过刮刀，纺丝滴，垂坠和激光散射法测量低和超低界面张力。
6. Light transmission and internal scattering in pulsed laser-etched partially-transparent silicon wafers [O] . Muhd Hatim Rohaizar, Suhaila Sepeai, Nurfarizza Surhada, 2019

机译：脉冲激光刻蚀的部分透明硅晶片中的光透射和内部散射
7. Measurement of Nano-fine Particles on Si Wafer Surface by Laser Light Scattering Method. [O] . Satoshi SASAKI, Hiroshi AN, Yuzo MORI, 2001

机译：激光散射法测量Si晶片表面上的纳米细颗粒。
8. Parallel Measurements of Light Scattering and Characterization of Marine Particles in Water: An Evaluation of Methodology [R] . Stramski, D. 2008

机译：水中海洋颗粒光散射和表征的并行测量：方法论评价

Measurement of Nano-fine Particles on Si Wafer Surface by Laser Light Scattering Method

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