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首页> 外文期刊>JSME International Journal. Series B, Fluids and Thermal Engineering >Low-Insertion-Loss Optical Matrix Switch Using MEMS Micromirrors Assembled by Passive Alignment
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Low-Insertion-Loss Optical Matrix Switch Using MEMS Micromirrors Assembled by Passive Alignment

机译：使用无源对准组装的MEMS微镜的低插入损耗光学矩阵开关

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摘要

A three-dimensional (3D)-type MEMS optical switch with low insertion loss and low assembly cost has been developed. The switch consists of two optical beam scanners placed facing each other. Each scanner consists of a collimator array and two mirror arrays. The scanner controls the direction of each optical beam by means of two single-axis mirrors. The mirror arrays are fabricated by MEMS technology and contain holes through which the beam traverses in each mirror array. The mirror arrays are stacked directly on the collimator array, which is passively aligned using pins and alignment holes. Based on this structure, a prototype 32-port (with three extra ports) optical switch was developed. Measured insertion loss of six arbitrary paths in the switch is in the range of 1.5 -1.9 dB. It is thus concluded that a 3D-type optical switch assembled by wholly passive alignment with lower insertion loss than 2 dB is feasible.
机译：已经开发了具有低插入损耗和低组装成本的三维（3D）型MEMS光开关。该开关由两个彼此相对放置的光束扫描仪组成。每个扫描仪由一个准直仪阵列和两个反射镜阵列组成。扫描仪通过两个单轴反射镜控制每个光束的方向。反射镜阵列是通过MEMS技术制造的，并包含孔，光束在每个反射镜阵列中穿过这些孔。反射镜阵列直接堆叠在准直器阵列上，准直器阵列使用引脚和对准孔被动对准。基于此结构，开发了原型32端口（带有三个额外端口）的光开关。开关中六个任意路径的测量插入损耗在1.5 -1.9 dB的范围内。因此可以得出结论，通过完全无源对准组装而成的插入损耗低于2 dB的3D型光开关是可行的。

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