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首页> 外文期刊>JSME International Journal. Series B, Fluids and Thermal Engineering >A MEMS-Based Active-Head Slider for Flying Height Control in Magnetic Recording
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A MEMS-Based Active-Head Slider for Flying Height Control in Magnetic Recording

机译：基于MEMS的有源磁头滑块，用于磁记录中的飞行高度控制

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摘要

This paper describes design and fabrication of a MEMS-based active-head slider using a PZT thin film for flying height control in hard disk drives. A piezoelectric cantilever integrated in an air bearing slider is used to adjust the flying height individually. A novel air bearing surface (ABS) geometry that minimizes the aerodynamic lift force generated beneath the head has been designed on the basis of the molecular gas film lubrication (MGL) theory. The slider with PZT actuator was fabricated monolithically by silicon micromachining. Performance of the actuator was tested by using an optical surface profiler. Furthermore, the fabricated slider was mounted on a suspension and flying height of the slider above a spinning disk has been measured by means of interferometry. Change in the head-disk spacing has been successfully confirmed by applying voltage to the PZT actuator.
机译：本文介绍了一种基于MEMS的有源头滑块的设计和制造，该滑块使用PZT薄膜来控制硬盘驱动器中的飞行高度。集成在空气轴承滑块中的压电悬臂用于单独调节飞行高度。根据分子气膜润滑（MGL）理论，设计了一种新颖的空气轴承表面（ABS）几何形状，该几何形状使在头部下方产生的气动升力最小。具有PZT执行器的滑块是通过硅微加工整体制造的。通过使用光学表面轮廓仪测试执行器的性能。此外，将制成的滑块安装在悬架上，并且已经通过干涉测量法测量了滑块在旋转盘上方的飞行高度。通过向PZT执行器施加电压已成功确认磁头磁盘间距的变化。

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