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首页> 外文期刊>Japanese journal of applied physics >Carrier transport in homoepitaxial diamond films with heavy phosphorus doping
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Carrier transport in homoepitaxial diamond films with heavy phosphorus doping

机译：重掺杂磷的同质外延金刚石薄膜中的载流子传输

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摘要

Carrier transport in heavily phosphorus (P)-doped n-type (n~+-type) diamond films as functions of P concentration and temperature was investigated. It was found that the carrier transport in these diamond films could be explained by summing the band conduction and a nearest-neighbor hopping (NNH) conduction at localized donor levels, even at a high temperature of approximately 500 K. In particular, heavily P-doped samples larger than 7.5 × 10~(19)cm~(-3) showed a high conductivity of over 9.8 × 10~(-2)Ω~(-1)cm~(-1) at 300 K by NNH conduction, which can be used for device application.
机译：研究了磷（P）掺杂的n型（n〜+型）金刚石薄膜中载流子随P浓度和温度的变化。已经发现，这些金刚石薄膜中的载流子传输可以通过对局部供体水平（即使在大约500 K的高温下）的带导和最近邻跳频（NNH）求和进行解释。大于7.5×10〜（19）cm〜（-3）的掺杂样品通过NNH导电在300 K时显示出9.8×10〜（-2）Ω〜（-1）cm〜（-1）的高电导率，可以用于设备应用程序。

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  • 来源
    《Japanese journal of applied physics》 |2014年第5s1期|05FP05.1-05FP05.5|共5页
  • 作者

    Tsubasa Matsumoto; Hiromitsu Kato; Toshiharu Makino; Masahiko Ogura; Daisuke Takeuchi; Hideyo Okushi; Satoshi Yamasaki;

  • 作者单位

    Pure and Applied Sciences, University of Tsukuba, Tsukuba, Ibaraki 305-8577, Japan,Energy Technology Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568, Japan,JST, CREST, c/o AIST, Tsukuba, Ibaraki 305-8568, Japan;

    Energy Technology Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568, Japan,JST, CREST, c/o AIST, Tsukuba, Ibaraki 305-8568, Japan;

    Energy Technology Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568, Japan,JST, CREST, c/o AIST, Tsukuba, Ibaraki 305-8568, Japan;

    Energy Technology Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568, Japan,JST, CREST, c/o AIST, Tsukuba, Ibaraki 305-8568, Japan;

    Energy Technology Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568, Japan,JST, CREST, c/o AIST, Tsukuba, Ibaraki 305-8568, Japan;

    Energy Technology Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568, Japan,JST, CREST, c/o AIST, Tsukuba, Ibaraki 305-8568, Japan;

    Pure and Applied Sciences, University of Tsukuba, Tsukuba, Ibaraki 305-8577, Japan,Energy Technology Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568, Japan,JST, CREST, c/o AIST, Tsukuba, Ibaraki 305-8568, Japan;

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