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首页> 外文期刊>Japanese journal of applied physics >Carrier generation mechanism and effect of tantalum-doping in transparent conductive amorphous SnO_2 thin films
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Carrier generation mechanism and effect of tantalum-doping in transparent conductive amorphous SnO_2 thin films

机译:透明导电无定形SnO_2薄膜中载流子的产生机理和掺杂钽的效应

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摘要

We investigated the transport properties of amorphous undoped and Ta-doped SnO_2 thin films grown on unheated glass substrates by pulsed laser deposition. Optimized films exhibited a resistivity of 2 × 10~(-3)Ωcm, carrier density (n_e) of (1-2) × 10~(20)cm~(-3), and were highly transparent in the visible region. Ta-doping had little effect on n_e in amorphous films, in contrast to in crystalline phases. These results suggest that carrier electrons in amorphous SnO_2 films originated from oxygen vacancies, similar to in In_2O_3-based amorphous films.
机译:我们研究了通过脉冲激光沉积在未加热的玻璃基板上生长的非晶态未掺杂和Ta掺杂的SnO_2薄膜的传输特性。优化后的薄膜的电阻率为2×10〜(-3)Ωcm,载流子密度(n_e)为(1-2)×10〜(20)cm〜(-3),并且在可见光区域具有高度透明性。与结晶相相比,Ta掺杂对非晶膜中的n_e影响很小。这些结果表明,与基于In_2O_3的非晶态薄膜相似,非晶态SnO_2薄膜中的载流子电子源自氧空位。

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  • 来源
    《Japanese journal of applied physics》 |2014年第5s1期|05FX04.1-05FX04.4|共4页
  • 作者单位

    Kanagawa Academy of Science and Technology (KAST), Kawasaki 213-0012, Japan,Japan Science and Technology Agency, CREST, Bunkyo, Tokyo 113-0033, Japan;

    Kanagawa Academy of Science and Technology (KAST), Kawasaki 213-0012, Japan,Japan Science and Technology Agency, CREST, Bunkyo, Tokyo 113-0033, Japan,Department of Chemistry, The University of Tokyo, Bunkyo, Tokyo 113-0033, Japan;

    Kanagawa Academy of Science and Technology (KAST), Kawasaki 213-0012, Japan,Japan Science and Technology Agency, CREST, Bunkyo, Tokyo 113-0033, Japan,Department of Chemistry, The University of Tokyo, Bunkyo, Tokyo 113-0033, Japan;

    Kanagawa Academy of Science and Technology (KAST), Kawasaki 213-0012, Japan,Japan Science and Technology Agency, CREST, Bunkyo, Tokyo 113-0033, Japan,Department of Chemistry, The University of Tokyo, Bunkyo, Tokyo 113-0033, Japan;

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