Formation of nanohole for positioning of colloidal quantum dot

Kohki Mukai; Teppei Sakai; Akinobu Hirota; Seisuke Nakashima

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Formation of nanohole for positioning of colloidal quantum dot

机译：用于定位胶体量子点的纳米孔的形成

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We propose a method of positioning a colloidal quantum dot (QD) using a nanohole on a Si substrate processed by oxidation with scanning probe microscope (SPM). We investigated two methods for the formation of the nanohole. Using oxide as a positive mask, we found that the hole of QD diameter and depth was not possible to fabricate since the oxidation does not progress deeply under the existing oxide. Using oxide as a negative mask, we found that the fabrication of a QD-size hole is achievable by dry etching. SPM observations suggest that a single sheet of PbS QDs can be trapped using a nanohole array.

机译：我们提出了一种使用纳米孔将胶体量子点（QD）定位在通过扫描探针显微镜（SPM）进行氧化处理的Si基板上的方法。我们研究了两种形成纳米孔的方法。使用氧化物作为正掩膜，我们发现无法制造QD直径和深度的孔，因为在现有氧化物下氧化不会深入进行。使用氧化物作为负掩膜，我们发现可以通过干法蚀刻来制造QD尺寸的孔。 SPM观察表明，可以使用纳米孔阵列捕获单张PbS QD。

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《Japanese journal of applied physics》 |2014年第6s期|06JF08.1-06JF08.4|共4页
作者
Kohki Mukai; Teppei Sakai; Akinobu Hirota; Seisuke Nakashima;
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Graduate School of Engineering, Yokohama National University, Yokohama 240-8501, Japan;

Graduate School of Engineering, Yokohama National University, Yokohama 240-8501, Japan;

Graduate School of Engineering, Yokohama National University, Yokohama 240-8501, Japan;

Graduate School of Engineering, Yokohama National University, Yokohama 240-8501, Japan,RIKEN Advanced Research Institute, Wako, Saitama 351-0198, Japan;

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1. Silica coating of PbS quantum dots and their position control using a nanohole on Si substrate [J] . Mukai Kohki, Okumura Isao, Nishizaki Yuta, Japanese journal of applied physics . 2018,第4S期

机译：Si衬底上纳米孔的PbS量子点二氧化硅涂层及其位置控制
2. Position control of PbS quantum dot using nanohole on silicon substrate processed by scanning probe lithography [J] . Mukai Kohki, Hirota Akinobu, Nakashima Seisuke Japanese journal of applied physics . 2015,第4s期

机译：利用纳米探针对硅衬底上的纳米孔进行PbS量子点的位置控制
3. Controlling the formation of quantum dot pairs using nanohole templates [J] . Eugenio Zallo, Paola Atkinson, Armando Rastelli, Journal of Crystal Growth . 2012,第1期

机译：使用纳米孔模板控制量子点对的形成
4. Third generation photovoltaics: Multiple Exciton Generation in colloidal quantum dots, quantum dot arrays, and quantum dot solar cells [C] . Beard Matthew C, Luther Joseph M, Midgett Aaron G, 35th IEEE Photovoltaic Specialists Conference . 2010

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5. Solution-processed colloidal lead sulfide quantum dots for near-infrared quantum information processing applications. [D] . Bose, Ranojoy. 2009

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7. Formation of Lateral Low Density In(Ga)As Quantum Dot Pairs in GaAs Nanoholes [O] . Alonso-González, Pablo, Martín-Sánchez, Javier, González Díez, Yolanda, 2009

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8. Electrical And Optical Properties Of Colloidal Quantum Dots And Quantum Dot Networks: Role Of Surface States And Using Biomolecular Links In Network Assembly [R] . Stroscio, M. A. , Dutta, M. , Ramadurai, D. , 2004

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Formation of nanohole for positioning of colloidal quantum dot

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