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首页> 外文期刊>Japanese journal of applied physics >Nanowall-Shaped MgO Substrate with Flat (100) Sidesurface: A New Route to Three-Dimensional Functional Oxide Nanostructured Electronics
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Nanowall-Shaped MgO Substrate with Flat (100) Sidesurface: A New Route to Three-Dimensional Functional Oxide Nanostructured Electronics

机译:具有平坦(100)侧面的纳米壁形状的MgO基板:通往三维功能氧化物纳米结构电子的新途径

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摘要

An architecturally designed nanowall-shaped MgO (nanowall MgO) was fabricated by the combination of nanoimprint lithography (NIL) and pulsed-laser deposition (PLD). The sidesurface on the nanowall MgO exhibited (111) facets with edge truncation instead of the most stable (100) face when the aspect ratio between the height and width of the nanowall MgO was lower than 0.7. By optimizing the surface crystallography, typically by designing the nanowall aspect ratio and controlling the postannealing treatment conditions, nanowall MgO with a single-crystal flat (100) sidesurface could be produced. Applying the nanowall MgO to a substrate, we demonstrated the formation of extremely small three-dimensional (3D) epitaxial metal oxide nanostructures with an arbitrarily controlled size. The nanofabrication technique utilizing the nanowall MgO substrate will open a new route to high-quality 3D epitaxial metal oxide nanostructures.
机译:通过纳米压印光刻(NIL)和脉冲激光沉积(PLD)的组合,制造出了结构设计合理的纳米壁形MgO(纳米壁MgO)。当纳米壁MgO的高度和宽度之间的纵横比小于0.7时,纳米壁MgO的侧面表现出具有边缘截断的(111)小面,而不是最稳定的(100)面。通过优化表面晶体学,通常通过设计纳米壁的长宽比并控制退火后的处理条件,可以生产具有单晶平坦(100)侧面的纳米壁MgO。将纳米壁MgO应用于基材,我们演示了具有任意控制尺寸的极小三维(3D)外延金属氧化物纳米结构的形成。利用纳米壁MgO衬底的纳米制造技术将为通往高质量3D外延金属氧化物纳米结构开辟一条新途径。

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  • 来源
    《Japanese journal of applied physics》 |2013年第1issue1期|015001.1-015001.5|共5页
  • 作者单位

    The Institute of Scientific and Industrial Research, Osaka University, Ibaraki, Osaka 567-0047, Japan;

    The Institute of Scientific and Industrial Research, Osaka University, Ibaraki, Osaka 567-0047, Japan;

    The Institute of Scientific and Industrial Research, Osaka University, Ibaraki, Osaka 567-0047, Japan;

    The Institute of Scientific and Industrial Research, Osaka University, Ibaraki, Osaka 567-0047, Japan;

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