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首页> 外文期刊>Japanese journal of applied physics >Resonance Properties of Surface Acoustic Wave Resonator in Supercritical CO_2
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Resonance Properties of Surface Acoustic Wave Resonator in Supercritical CO_2

机译：表面声波谐振器在超临界CO_2中的共振特性

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摘要

A supercritical fluid is a fluid at a temperature and pressure above its critical point. Supercritical CO_2 functions as a moderate solvent, has zero surface tension, and has high permeability in fine structures. These properties are regarded as ideal for the processing of nano- and microscale substances. A problem of applying supercritical fluids is fluctuations in their density. By utilizing a surface acoustic wave (SAW), it may be possible to realize a sensor for measuring the density fluctuation. In this study, the resonance property of a shear-horizontal-type SAW resonator fabricated on a 36° Y-X LiTaO_3 substrate and the impedance of an interdigitated electrode (IDE) fabricated on a nonpiezoelectric substrate were measured in high-pressure CO2. Abrupt changes in the resonance property owing to discontinuous changes in the density and viscosity were observed at a certain CO2 pressure between gas and liquid phases. The impedance change of the IDE owing to discontinuous changes in the permittivity was also observed.
机译：超临界流体是温度和压力高于其临界点的流体。超临界CO_2用作中等溶剂，表面张力为零，并且在精细结构中具有高渗透性。这些性质被认为是纳米和微米级物质加工的理想选择。应用超临界流体的问题是其密度的波动。通过利用表面声波（SAW），可以实现用于测量密度波动的传感器。在这项研究中，在高压CO2中测量了在36°Y-X LiTaO_3衬底上制造的横剪型SAW谐振器的谐振特性和在非压电衬底上制造的叉指电极（IDE）的阻抗。在气相和液相之间的一定CO 2压力下，观察到由于密度和粘度的不连续变化而引起的共振特性的突然变化。还观察到由于介电常数的不连续变化引起的IDE的阻抗变化。

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  • 来源
    《Japanese journal of applied physics》 |2012年第7issue2期|p.07GC18.1-07GC18.4|共4页
  • 作者

    Shoji Kakio; Katsuhiro Hayashi; Eiichi Kondoh;

  • 作者单位

    Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Kofu 400-8511, Japan;

    Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Kofu 400-8511, Japan;

    Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Kofu 400-8511, Japan;

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