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首页> 外文期刊>Japanese journal of applied physics >Improvement of Spatial Resolution in Raman Spectroscopy Selecting Measurement Area by Opaque Material Deposition
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Improvement of Spatial Resolution in Raman Spectroscopy Selecting Measurement Area by Opaque Material Deposition

机译：通过不透明材料沉积提高拉曼光谱选择测量区域的空间分辨率

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摘要

We have succeeded in the strain analysis beyond the spatial resolution in conventional Raman measurements, which can be achieved by selecting the strain-induced measurement area by an opaque material. Tungsten (W) film deposited by electron beam (EB)-assisted deposition was used for the opaque material in this study. The EB-W film has the properties of a relatively high absorption coefficient and a low density. These features give rise to shading of the excitation light without stress induction into Si. As a result, the wave number shift of 0.86 cm~(-1) was obtained in the Si substrate with 100-nm-wide space SiN pattern, whose value was higher than that obtained in conventional Raman measurements, 0.3-0.4 cm~(-1). Furthermore, the spatial resolution of Raman spectroscopy with the W film deposition was better than that of Raman spectroscopy with an immersion lens. We can say that the methodology is a promising candidate to measure strain in fine structures.
机译：我们已经超越了传统拉曼测量中的空间分辨率，成功地完成了应变分析，这可以通过使用不透明材料选择应变感应的测量区域来实现。通过电子束（EB）辅助沉积沉积的钨（W）膜用于本研究中的不透明材料。 EB-W膜具有相对高的吸收系数和低密度的特性。这些特征引起了激发光的遮蔽而没有应力感应到Si中。结果，在具有100nm宽的间隔SiN图案的Si衬底中，获得了0.86cm〜（-1）的波数位移，其值比常规拉曼测量中获得的值高0.3-0.4cm〜（-1）。 -1）。此外，具有W膜沉积的拉曼光谱的空间分辨率优于具有浸没透镜的拉曼光谱的空间分辨率。可以说，该方法是测量精细结构中的应变的有希望的候选者。

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  • 来源
    《Japanese journal of applied physics》 |2011年第6issue1期|p.061301.1-061301.5|共5页
  • 作者

    Munehisa Takei; Daisuke Kosemura; Hiroaki Akamatsu; Kohki Nagata; Atsushi Ogura;

  • 作者单位

    School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan;

    School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan,Research Fellow of the Japan Society for the Promotion of Science, Chiyoda, Tokyo 102-8472, Japan;

    School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan;

    School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan;

    School of Science and Technology, Meiji University, Kawasaki 214-8571, Japan;

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