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首页> 外文期刊>Japanese journal of applied physics >Actinometry Measurement of Dissociation Degrees of Nitrogen and Oxygen in N_2- O_2 Microwave Discharge Plasma
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Actinometry Measurement of Dissociation Degrees of Nitrogen and Oxygen in N_2- O_2 Microwave Discharge Plasma

机译：光度法测量N_2-O_2微波放电等离子体中氮和氧的解离度

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摘要

The dissociation degrees of N_2 and O_2 are examined in a nitrogen-oxygen mixed microwave discharge plasma in a cylindrical quartz tube of 26 mm inner diameter with a discharge pressure of 0.5.1.0 Torr and a microwave power of 600 W by the actinometry method. We measured the electron temperature and density with a Langmuir double probe, while the vibrational and rotational temperatures of the first and second positive bands of N_2 were measured by optical emission spectroscopy. Even when the line intensity of atomic nitrogen was weak and partly coincided with the high-intensity band spectrum of the first positive system due to its small dissociation degree, the actinometry method was found to be feasible when the first positive band spectrum, calculated as a function of the rotational and vibrational temperatures, was subtracted from that observed experimentally. It was found that the dissociation degrees of both N_2 and O_2 increase with the molar ratio of nitrogen in the mixed N_2-O_2 discharge gas for the same total discharge pressure. The experimental results are discussed by comparison with a simple numerical model based on chemical kinetics in the plasma. It was found that the dissociation of oxygen molecules is enhanced by the collision with excited nitrogen molecules, particularly those with metastable states, whereas that of nitrogen is suppressed by an admixture of oxygen molecules due to the chemical quenching processes of nitrogen atoms.
机译：通过光化法，在内径为26mm的圆筒形石英管中，在氮气-氧气混合微波放电等离子体中，以0.5.1.0Torr的放电压力和600W的微波功率检查N_2和O_2的解离度。我们用Langmuir双探针测量了电子温度和密度，而N_2的第一和第二正带的振动和旋转温度是通过光发射光谱法测量的。即使原子氮的线强度较弱，并且由于其解离度小而部分与第一正系统的高能带光谱重合，但当第一正能谱按以下公式计算时，发现光化法是可行的从实验观察到的值减去旋转和振动温度的函数。发现在相同的总排气压力下，N_2和O_2的解离度均随着混合N_2-O_2排气中氮的摩尔比的增加而增加。通过与基于等离子体中化学动力学的简单数值模型进行比较，讨论了实验结果。已发现，通过与激发的氮分子，特别是具有亚稳态的那些激发的氮分子的碰撞增强了氧分子的离解，而由于氮原子的化学淬灭过程，通过氧分子的混合抑制了氮的离解。

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  • 来源
    《Japanese journal of applied physics》 |2010年第10期|p.106101.1-106101.16|共16页
  • 作者

    Yosuke Ichikawa; Takeshi Sakamoto; Atsushi Nezu; Haruaki Matsuura; Hiroshi Akatsuka;

  • 作者单位

    Department of Nuclear Engineering, Tokyo Institute of Technology, 2.12.1-N1.10, O-Okayama, Meguro, Tokyo 152-8550, Japan;

    Department of Energy Sciences, Tokyo Institute of Technology, 2.12.1-N1.10, O-Okayama, Meguro, Tokyo 152-8550, Japan;

    Research Laboratory for Nuclear Reactors, Tokyo Institute of Technology, 2.12.1-N1.10, O-Okayama, Meguro, Tokyo 152-8550, Japan;

    Research Laboratory for Nuclear Reactors, Tokyo Institute of Technology, 2.12.1-N1.10, O-Okayama, Meguro, Tokyo 152-8550, Japan;

    Department of Nuclear Engineering, Tokyo Institute of Technology, 2.12.1-N1.10, O-Okayama, Meguro, Tokyo 152-8550, Japan,Department of Energy Sciences, Tokyo Institute of Technology, 2.12.1-N1.10, O-Okayama, Meguro, Tokyo 152-8550, Japan,Research Laboratory for Nuclear Reactors, Tokyo Institute of Technology, 2.12.1-N1.10, O-Okayama, Meguro, Tokyo 152-8550, Japan;

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