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首页> 外文期刊>Japanese journal of applied physics >Effect of Zinc Content on Dielectric Properties of Cubic Pyrochlore Bi_2O_3-ZnO-Nb_2O_5 Thin Films
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Effect of Zinc Content on Dielectric Properties of Cubic Pyrochlore Bi_2O_3-ZnO-Nb_2O_5 Thin Films

机译：锌含量对立方烧绿石Bi_2O_3-ZnO-Nb_2O_5薄膜介电性能的影响

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摘要

Cubic pyrochlore Bi_2O_3-ZnO-Nb_2O_5 (BZN) thin films with different zinc contents have been deposited on Pt(111)/TiO_x/SiO_2/Si(100) substrates by rf magnetron sputtering. Dielectric property measurements revealed the dependence of dielectric properties on zinc content in BZN thin films. BZN thin films with a composition close to that of Bi_(1.5)Zn_(1.0)Nb_(1.5)O_7 demonstrate the largest permittivity of ～160 and the highest tunability of ～20%. Both insufficient and excess zinc contents have resulted in smaller permittivity as well as degraded dielectric tunability. The role of zinc in the tunability of BZN thin films was discussed in light of field-forced rearrangement of the randomly disordered ions on the A and O' sites under the influence of an electric field.
机译：通过射频磁控溅射在Pt（111）/ TiO_x / SiO_2 / Si（100）衬底上沉积了锌含量不同的立方烧绿石Bi_2O_3-ZnO-Nb_2O_5（BZN）薄膜。介电性能测量揭示了介电性能对BZN薄膜中锌含量的依赖性。组成接近Bi_（1.5）Zn_（1.0）Nb_（1.5）O_7的BZN薄膜的最大介电常数约为160，可调谐性最高为20％。锌含量不足和过量都会导致介电常数减小以及介电可调性下降。鉴于电场作用下随机无序离子在A和O'位上的电场强迫重排，讨论了锌在BZN薄膜可调谐性中的作用。

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  • 来源
    《Japanese journal of applied physics》 |2009年第12期|121402.1-121402.4|共4页
  • 作者

    Shuwen Jiang; Yanrong Li;

  • 作者单位

    State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China;

    State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China;

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