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首页> 外文期刊>Japanese journal of applied physics >In situ Observation of the Fatigue-Free Piezoelectric Microcantilever by Two-Dimensional X-ray Diffraction
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In situ Observation of the Fatigue-Free Piezoelectric Microcantilever by Two-Dimensional X-ray Diffraction

机译：二维X射线衍射原位观察无疲劳压电微悬臂梁

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摘要

A (111)Pt/(001)_G LaNiO_3/(001)(100)Pb(2r_(0.44)Ti_(0.56))O_3/(001)_G LaNiO_3/(111)Pt/TiO_2/SiO_2/(001)Si heterostructured piezoelectric micro-cantilever demonstrated a high fatigue endurance over 1 × 10~(10) switching cycles and a large transverse piezoelectric constant (d_(31)) of about - 140 pm/V. The fatigue endurance was improved by suppressing the increase in the number of oxygen vacancies in Pb(Zr_(0.44)Ti_(0.56))O_3 film using LaNiO_3 oxide layers as top and bottom electrodes. The origin of the large d_(31) was a reversible 90°-domain rotation from a- to c-domains, which was confirmed by an in situ two-dimensional X-ray diffraction (XRD~2) technique with a 100μmø incidence X-ray and a highly sensitive two-dimensional detector under an applied voltage. The XRD~2 technique demonstrated the feasibility of superior piezoelectric devices with a large piezoelectric displacement and a high reliability for repetitive operation.
机译：（111）Pt /（001）_G LaNiO_3 /（001）（100）Pb（2r_（0.44）Ti_（0.56））O_3 /（001）_G LaNiO_3 /（111）Pt / TiO_2 / SiO_2 /（001）Si异质结构压电微悬臂梁在1×10〜（10）的开关周期内显示出较高的耐疲劳性，并具有约-140 pm / V的较大的横向压电常数（d_（31））。通过使用LaNiO_3氧化物层作为上下电极，抑制Pb（Zr_（0.44）Ti_（0.56））O_3膜中氧空位数目的增加，从而提高了疲劳强度。大d_（31）的起源是从a域到c域可逆的90°域旋转，这是通过原位二维X射线衍射（XRD〜2）技术证实的，入射角X为100μm射线和高灵敏度的二维检测器。 XRD〜2技术证明了具有大压电位移和重复操作高可靠性的优质压电器件的可行性。

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  • 来源
    《Japanese journal of applied physics》 |2009年第9issue2期|09KA03.1-09KA03.5|共5页
  • 作者

    Hitoshi Morioka; Keisuke Saito; Takeshi Kobayashi; Shintaro Yasui; Toshiyuki Kurosawa; Hiroshi Funakubo;

  • 作者单位

    Application Laboratory, Bruker AXS, Moriya, Kanagawa-ku, Yokohama 221-0022, Japan Department of Innovative and Engineered Materials, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, Nagatsuta, Midoh-ku, Yokohama 226-8502, Japan;

    Application Laboratory, Bruker AXS, Moriya, Kanagawa-ku, Yokohama 221-0022, Japan;

    National Institute of Advanced Industrial Science and Technology (AIST), Namiki, Tshukuba, Ibaraki 305-8564, Japan;

    Department of Innovative and Engineered Materials, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, Nagatsuta, Midoh-ku, Yokohama 226-8502, Japan;

    Bruker AXS, Moriya, Kanagawa-ku, Yokohama 221-0022, Japan;

    Department of Innovative and Engineered Materials, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, Nagatsuta, Midoh-ku, Yokohama 226-8502, Japan;

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