Fine Structures of Laser-Driven Punched-Out Tin Fuels Observed with Extreme Ultraviolet Backlight Imaging

Tsuyoshi Ando; Shinsuke Fujioka; Yoshinori Shimada; Tomoya Birou; Shinsuke Maeda; Yuzuri Yasuda; Keiji Nagai; Takayoshi Norimatsu Hiroaki Nlshlmura; Katsunobu Nishihara; Noriaki Miyanaga; Yasukazu Izawa; Kunioki Mima

首页> 外文期刊>Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers >Fine Structures of Laser-Driven Punched-Out Tin Fuels Observed with Extreme Ultraviolet Backlight Imaging

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Fine Structures of Laser-Driven Punched-Out Tin Fuels Observed with Extreme Ultraviolet Backlight Imaging

机译：极紫外背光成像观察到的激光驱动冲孔锡燃料的精细结构。

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The laser-driven punched-out scheme, which has been proposed for supplying minimum-mass tin fuels at a high repetition rate, was investigated for use in an extreme ultraviolet (EUV) light source. The density profile of punched-out tin fuel is a critical parameter for validating applicability of this scheme. An EUV backlight technique was developed to measure the density profile and fine structure. Experimental results reveal that a punched-out target does not remain its initial thin shape, but expands into a rarefied gas and liquid and small particles under the present target and laser conditions.

机译：已经研究了用于高重复率提供最小质量锡燃料的激光驱动打孔方案，该方案被用于极紫外（EUV）光源。冲压出的锡燃料的密度分布图是验证该方案的适用性的关键参数。开发了EUV背光技术来测量密度分布和精细结构。实验结果表明，在当前的靶材和激光条件下，打孔的靶材不会保持其初始的薄形状，而是会扩展为稀有气体，液体和小颗粒。

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《Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers》 |2008年第1issue1期|p.293-296|共4页
作者
Tsuyoshi Ando; Shinsuke Fujioka; Yoshinori Shimada; Tomoya Birou; Shinsuke Maeda; Yuzuri Yasuda; Keiji Nagai; Takayoshi Norimatsu Hiroaki Nlshlmura; Katsunobu Nishihara; Noriaki Miyanaga; Yasukazu Izawa; Kunioki Mima;
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3. Actinic imaging and evaluation of phase structures on extreme ultraviolet lithography masks [J] . lacopo Mochi, Kenneth A. Goldberg, Sungmin Huh Journal of Vacuum Science & Technology . 2010,第6期

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Fine Structures of Laser-Driven Punched-Out Tin Fuels Observed with Extreme Ultraviolet Backlight Imaging

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