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首页> 外文期刊>Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers >Fabrication of Poly(tetrafluoroethylene) Microparts by High-Energy X-ray-Induced Etching
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Fabrication of Poly(tetrafluoroethylene) Microparts by High-Energy X-ray-Induced Etching

机译：高能X射线诱导刻蚀制备聚四氟乙烯微件

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摘要

Poly(tetrafluoroethylene) (PTFE) microstructures' processing characteristics are studied using X-ray photo-decomposition and desorption in the highest energy region (2 to over 12keV). While the exposed surface states are observed to melt and boil from the remaining bubble structure on the irradiated surface, the basic photochemistry of PTFE is considered to be the same as that described in previous reports, and high-aspect-ratio structures are successfully formed. We developed new Ni-electroformed stencil masks and successfully fabricated the first and practical example of PTFE microfluidic part. The characteristics of the fabricated microfluidic part, a PTFE fluid filter for vertical fluid flow operation, which works as a passive valve, agreed with the calculated results. This suggests that the accuracy of the patterning is adequate for the application of this technique to the fabrication of microfluidic parts and various other microparts.
机译：聚四氟乙烯（PTFE）微结构的加工特性是在最高能量区域（2keV到12keV以上）中使用X射线光分解和解吸来研究的。虽然观察到暴露的表面状态会从受辐照表面上的残留气泡结构融化和沸腾，但PTFE的基本光化学被认为与以前的报告中所述的相同，并且成功地形成了高纵横比的结构。我们开发了新的镍电铸模版掩模，并成功制造了PTFE微流体零件的第一个实用实例。所制造的微流体部件（用于垂直流体流动操作的PTFE流体过滤器）作为被动阀的特性与计算结果相符。这表明构图的精确度足以将该技术应用到微流体部件和各种其他微部件的制造中。

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