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首页> 外文期刊>Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers >Characterization and Modeling of Voltage and Temperature Dependence of Capacitance in Al_2O_3-Laminated Ta_2O_5 Metal-Insulator-Metal Capacitor
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Characterization and Modeling of Voltage and Temperature Dependence of Capacitance in Al_2O_3-Laminated Ta_2O_5 Metal-Insulator-Metal Capacitor

机译：Al_2O_3叠层Ta_2O_5金属-绝缘子-金属电容器的电容电压和温度依赖性的表征和建模

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摘要

Metal-insulator-metal (MIM) capacitors with Al_2O_3-laminated Ta_2O_5 insulators are fabricated and characterized in terms of voltage linearity and temperature linearity. Voltage dependence of capacitance in the laminated capacitor is dominated by the capacitance change in the Al_2O_3 layer. Therefore, the voltage-linearity coefficients of the laminated capacitor can be predicted using the coefficient of the single-layer Al_2O_3 capacitor and the effective oxide thickness (EOT) of the laminated capacitor. Moreover, the temperature coefficient of capacitance (TCC) is not dominated by an interface characteristic, but by a bulk characteristic of the insulators. We propose a model that the TCC of the laminated capacitor can be given by a linear combination of the TCC of each insulator and its EOT ratio. The model has been validated by experimental data.
机译：制备了具有Al_2O_3层压的Ta_2O_5绝缘体的金属-绝缘体-金属（MIM）电容器，并根据电压线性和温度线性进行了表征。叠层电容器中电容的电压依赖性取决于Al_2O_3层中的电容变化。因此，可以使用单层Al_2O_3电容器的系数和层压电容器的有效氧化物厚度（EOT）来预测层压电容器的电压-线性系数。此外，电容的温度系数（TCC）不是由界面特性决定，而是由绝缘体的体积特性决定。我们提出了一个模型，即叠层电容器的TCC可以通过每个绝缘子的TCC及其EOT比的线性组合给出。该模型已通过实验数据验证。

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