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首页> 外文期刊>Japanese journal of applied physics >Characteristics of Double-Pulse Discharge in Supersonic Flow for Excimer Laser Excitation
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Characteristics of Double-Pulse Discharge in Supersonic Flow for Excimer Laser Excitation

机译：准分子激光激发的超音速流中双脉冲放电特性

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摘要

The development of a high-repetition-rate excimer laser is a vital requirement for providing a high average power and a high throughput. However, its development has been limited by various factors produced by excitation discharge. In this study, a double-pulse discharge method in a supersonic flow with a Mach number of 2.0 is used to simulate a high-repetition-rate excimer laser. An equivalent repetition rate f for the stable discharge of as high as 17 kHz is obtained. A glow discharge is also obtained between the electrodes at f = 20 kHz; however, a discharge between the cathode and the UV pins appears almost simultaneously. At f ≥ 25kHz, the second discharge becomes an arc through the heated column produced by the former discharge or in the region downstream of the shock wave moving upstream from the heated column. It is clearly demonstrated in this study that not only the heated column but also the shock wave has a key effect on the stability of the subsequent discharge. From the results, a formula for estimating the maximum repetition rate in a supersonic flow is proposed.
机译：高重复频率准分子激光器的发展是提供高平均功率和高通量的重要要求。但是，其发展受到励磁放电产生的各种因素的限制。在这项研究中，使用马赫数为2.0的超音速流中的双脉冲放电方法来模拟高重复频率的准分子激光器。获得的稳定放电的等效重复率f高达17 kHz。在f = 20 kHz时，在电极之间也获得辉光放电。然而，阴极和UV引脚之间的放电几乎同时出现。在f≥25kHz时，第二次放电成为一条电弧，该电弧通过由前一放电产生的加热柱或在加热柱上游的冲击波下游区域产生的电弧。在这项研究中清楚地表明，不仅加热的色谱柱而且冲击波都对后续放电的稳定性产生关键影响。从结果出发，提出了一种估计超音速流中最大重复率的公式。

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