Structural Analysis of High-Density Vertically Aligned Carbon Nanotubes Grown by Thermal Chemical Vapor Deposition with Fe/Al Multilayer Catalyst

TAKUJI KOMUKAI; KATSUNORI AOKI; HIROSHI FURUTA; MAMORU FURUTA; KENJIRO OURA; TAKASHI HIRAO

首页> 外文期刊>Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers >Structural Analysis of High-Density Vertically Aligned Carbon Nanotubes Grown by Thermal Chemical Vapor Deposition with Fe/Al Multilayer Catalyst

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Structural Analysis of High-Density Vertically Aligned Carbon Nanotubes Grown by Thermal Chemical Vapor Deposition with Fe/Al Multilayer Catalyst

机译：Fe / Al多层催化剂热化学气相沉积生长高密度垂直取向碳纳米管的结构分析

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摘要

A detailed structural analysis has been carried out on vertically aligned carbon nanotubes (CNTs) formed by thermal chemical vapor deposition (CVD) with an Fe/Al multilayer catalyst on a Si substrate. From the results, it was confirmed that the CNTs are composed of two configurations, namely high-density vertically aligned CNTs formed on the catalyst, followed by randomly oriented thin CNTs with low crystallinity formed on the high-density CNTs. Growth kinetics was proposed by considering the dependence of the CNT growth rate on the size of catalyst grains.

机译：已经对在硅基板上通过热化学气相沉积（CVD）和Fe / Al多层催化剂形成的垂直排列的碳纳米管（CNT）进行了详细的结构分析。从结果证实，CNT由两种构型组成，即在催化剂上形成的高密度垂直取向的CNT，然后在高密度CNT上形成具有低结晶度的无规取向的薄CNT。通过考虑CNT生长速率对催化剂晶粒尺寸的依赖性来提出生长动力学。

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来源
《Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers》 |2006年第11期|p.8988-8990|共3页
作者
TAKUJI KOMUKAI; KATSUNORI AOKI; HIROSHI FURUTA; MAMORU FURUTA; KENJIRO OURA; TAKASHI HIRAO;
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作者单位

Nitta Haas Inc., 172 Ikezawa-cho, Yamatokoriyama, Nara 639-1032, Japan;

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原文格式 PDF
正文语种 eng
中图分类应用物理学;
关键词
carbon nanotube; vertically aligned; chemical vapor deposition; multi walled carbon nanotube; multilayer catalyst;

机译：碳纳米管;垂直排列;化学气相沉积;多壁碳纳米管;多层催化剂;

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专利

1. Effect of Different Catalyst Deposition Technique on Aligned Multiwalled Carbon Nanotubes Grown by Thermal Chemical Vapor Deposition [J] . Mohamed ShuaibMohamed Saheed, Norani MutiMohamed, Zainal ArifBurhanudin Journal of nanomaterials . 2014,第1期

机译：不同催化剂沉积工艺对热化学气相沉积生长取向多壁碳纳米管的影响
2. Effects of carbon content in iron catalyst coatings on the growth of vertically aligned carbon nanotubes on smooth silicon surfaces by thermal chemical vapor deposition [J] . C. Liu, Y. C. Chen, Y. Tzeng Diamond and Related Materials . 2004,第4a8期

机译：铁催化剂涂层中碳含量对通过热化学气相沉积法在光滑硅表面上垂直排列的碳纳米管生长的影响
3. Vertically aligned carbon nanotube arrays grown on a lamellar catalyst by fluidized bed catalytic chemical vapor deposition [J] . Qiang Zhang, Meng-Qiang Zhao, Jia-Qi Huang Carbon: An International Journal Sponsored by the American Carbon Society . 2009,第11期

机译：通过流化床催化化学气相沉积在层状催化剂上生长的垂直排列的碳纳米管阵列
4. Electron emission of vertically aligned carbon nanotubes grown on a large area silicon substrate thermal chemical vapor deposition [C] . Cheol J. Lee, Jung H. Park, Kwon H. Son, MRS Meeting . 2001

机译：在大面积硅衬底热化学气相沉积上生长的垂直对准碳纳米管的电子发射
5. Growth of carbon nanotubes on patterned silicon wafer by thermal chemical vapor deposition (CVD). [D] . Wang, Chiu-Hui. 2005

机译：通过热化学气相沉积（CVD）在图案化的硅晶片上生长碳纳米管。
6. Chemical Vapor Deposition of Vertically Aligned Carbon Nanotube Arrays: Critical Effects of Oxide Buffer Layers [O] . Haohao Li, Guangjie Yuan, Bo Shan, 2019

机译：垂直对齐的碳纳米管阵列的化学气相沉积：氧化物缓冲层的关键影响。
7. In situ control of the catalyst efficiency in chemical vapor deposition of vertically aligned carbon nanotubes on predeposited metal catalyst films [O] . Gyula Eres, A. A. Puretzky, D. B. Geohegan, 2004

机译：原位控制垂直对准碳纳米管的化学气相沉积催化剂效率对预封闭金属催化剂薄膜的催化剂效率
8. Superior Thermal Interface via Vertically Aligned Carbon Nanotubes Grown on Graphite Foils. [R] . Ganguli, S., Roy, A. K., Wheeler, R., 2012

机译：通过在石墨箔上生长的垂直排列的碳纳米管的优异的热界面。

Structural Analysis of High-Density Vertically Aligned Carbon Nanotubes Grown by Thermal Chemical Vapor Deposition with Fe/Al Multilayer Catalyst

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