Evaluations of Electron Density and Temperature in Atmospheric-Pressure Radio-Frequency Helium Plasma Jet

Shou-Zhe Li; De-Zhen Wang; Wen-Chao Zhu; Yi-Kang Pu

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Evaluations of Electron Density and Temperature in Atmospheric-Pressure Radio-Frequency Helium Plasma Jet

机译：大气压射频氦等离子体射流中电子密度和温度的评估

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摘要

In this study, the electrical discharge characteristics of an atmospheric-pressure helium plasma jet using radio-frequency power supply are investigated by measuring the electrical parameters (voltage, current, power, and phase angle). The plasma parameters (electron temperature and electron density) are estimated on the basis of the electrical experiment data using the equivalent circuit model and the power balance equation. By varying input power, a "phase saturation" region is identified. The optimized flow rate ratio between oxygen and helium is found to be 0.1/40 slpm in the experiment.

机译：在这项研究中，通过测量电参数（电压，电流，功率和相角）来研究使用射频电源的大气压氦等离子体射流的放电特性。使用等效电路模型和功率平衡方程，根据电实验数据估算等离子体参数（电子温度和电子密度）。通过改变输入功率，识别“相位饱和”区域。在实验中发现氧气和氦气之间的最佳流速比为0.1 / 40 slpm。

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来源
《Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers》 |2006年第12期|p.9213-9215|共3页
作者
Shou-Zhe Li; De-Zhen Wang; Wen-Chao Zhu; Yi-Kang Pu;
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作者单位

State Key Laboratory of Materials Modification by Laser, Ion and Electron Beam and Department of Physics, Dalian University of Technology, Dalian 116024, China;

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原文格式 PDF
正文语种 eng
中图分类应用物理学;
关键词
plasma jet; atmospheric pressure; electron temperature; electron density;

机译：等离子射流;大气压;电子温度;电子密度;

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2. Manipulation of Lipase Activity by the Helium Radio-Frequency, Atmospheric-Pressure Glow Discharge Plasma Jet [J] . He-Ping Li, Li-Yan Wang, Guo Li, Plasma processes and polymers . 2011,第3期

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3. Dependence on the scattering angle of the electron temperature and electron density in Thomson-scattering measurements on an atmospheric-pressure plasma jet (vol 61, pg 1920, 2000) [J] . Snyder SC., Crawford DM., Fincke JR. Physical review, E. Statistical physics, plasmas, fluids, and related interdisciplinary topics . 2000,第6aPta2期

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4. Chemical kinetics of a radio-frequency driven atmospheric-pressure helium-oxygen plasma in humid air [C] . T. Murakami, K. Niemi, T. Gans, International Conference on Phenomena in Ionized Gases . 2011

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5. Optical and Mass Spectrometric Studies of a Helium Dielectric-Barrier Atmospheric-Pressure Plasma Jet Used as an Ambient Desorption Ionization Source. [D] . Heywood, Matthew S. 2012

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6. Analysis of reactive oxygen and nitrogen species generated in three liquid media by low temperature helium plasma jet [O] . Julie Chauvin, Florian Judée, Mohammed Yousfi, -1

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7. Power dissipation, gas temperatures and electron densities of cold atmospheric pressure helium and argon RF plasma jets [O] . S Hofmann, A F H van Gessel, T Verreycken, 2011

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8. An Appendix to the Paper Plasma Electron Temperature Determination in Low-Density Plasmas from the Helium I 3889 A and 5016 A Line Intensities [R] . Brenning, N. 1981

机译：氦气I 3889 a和5016 a线强度测定低密度等离子体中等离子体电子温度的附录

Evaluations of Electron Density and Temperature in Atmospheric-Pressure Radio-Frequency Helium Plasma Jet

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