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首页> 外文期刊>Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers >Soft Magnetic Properties of High-Density Fe Cluster-Assembled Films by Energetic Cluster Deposition
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Soft Magnetic Properties of High-Density Fe Cluster-Assembled Films by Energetic Cluster Deposition

机译：高能铁团簇沉积高能簇沉积薄膜的软磁性能

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摘要

High-density Fe cluster-assembled films were obtained at room temperature by an energetic cluster deposition. Fe clusters with an average cluster size of 12 nm were produced using our new plasma-gas-condensation-type cluster deposition apparatus. Ionized clusters in a cluster beam were accelerated electrically and directly deposited onto a substrate together with neutral clusters from the same cluster source. By increasing the impact energy of ionized clusters up to about 1 eV/atom, the obtained cluster assemblies have packing fractions higher than 0.8 without a marked size change, and reveal a soft magnetic behavior up to a frequency range of few hundred MHz and a high electrical resistivity.
机译：通过高能簇沉积在室温下获得高密度的Fe簇组装膜。使用我们的新型等离子体-气体冷凝型团簇沉积设备生产出平均团簇尺寸为12 nm的Fe团簇。簇束中的离子簇被电加速，并与来自同一簇源的中性簇一起直接沉积到基板上。通过将电离团簇的冲击能量提高到大约1 eV /原子，所获得的团簇组件的填充率大于0.8，而尺寸没有明显变化，并且在高达几百MHz的频率范围内具有较高的软磁性能。电阻率。

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