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首页> 外文期刊>Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers >Heterojunction Bipolar Phototransistor with Monolithic Integrated Microlens
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Heterojunction Bipolar Phototransistor with Monolithic Integrated Microlens

机译:单片集成微透镜的异质结双极型光电晶体管

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摘要

In this paper, we present a monolithic integration of a microlens and an InP/InGaAs heterojunction bipolar phototransistor (HPT). Three types of HPTs were fabricated and their optical characteristics were investigated. The optical gain of the proposed HPT was improved 6-fold compared to the front type HPT. The HPT with a back-side microlens showed 0.61 A/W dc responsivity (PD mode) and that of an HPT without a lens showed 0.18 A/W (PD mode) at 1.55 μm illumination. Quantum efficiency was increased by 34.8%. The fiber alignment tolerance has also been improved. The HPT with a lens showed a 40 μm tolerance, while the HPT without a lens exhibited a 22-μm tolerance at 3 dB below the maximum values.
机译:在本文中,我们提出了微透镜和InP / InGaAs异质结双极型光电晶体管(HPT)的单片集成。制作了三种类型的HPT,并研究了它们的光学特性。与前置式HPT相比,建议的HPT的光学增益提高了6倍。具有背面微透镜的HPT在1.55μm照度下显示0.61 A / W dc响应(PD模式),而无透镜的HPT显示0.18 A / W(PD模式)。量子效率提高了34.8%。光纤对准公差也得到了改善。带有透镜的HPT表现出40μm的公差,而没有透镜的HPT在低于最大值3 dB时表现出22μm的公差。

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