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首页> 外文期刊>Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers >Fabrication of Low-Frequency AC-DC Thermal Converter with Thermal Mass
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Fabrication of Low-Frequency AC-DC Thermal Converter with Thermal Mass

机译：具有热质量的低频AC-DC热转换器的制造

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摘要

The use of a thin film or a planar multijunction thermal converter (PMJTC) for the ac-dc transfer of voltage and current is well established. In general, a three dimensional multijunction thermal converter (MJTC) has the advantage of accuracy and a single junction thermal converter (SJTC) has that of low cost. PMJTCs provide a long-term stability, a high sensitivity and a high-dynamic-frequency range. It is well known that PMJTCs show small ac-dc voltage transfer differences in the audiofrequency range. However, it is difficult to obtain a small ac-dc transfer difference at low frequencies, particularly with thin-film-based thermal converters. The small ac-dc transfer difference at low frequencies is caused by nonlinearities in the heat transport mechanism (in thin films) and in the thermal-to-electric conversion process (in the thermocouples of thin films). This study has been conducteded to achieve a smaller ac-dc transfer difference on thin-film chromel-alumel thermal converters operating at low frequencies. An optional silicon obelisk is formed underneath the thin membrane to minimize ac-dc transfer differences at lower frequencies. The floating obelisk structure enhances the isothermal operation and slows thermal transfer compared with the standard configuration without the obelisk, resulting in a smaller ac-dc transfer difference at low frequencies. Also, it is possible that thin-film thermal converters can be used as the flow sensor and infrared sensor.
机译：薄膜或平面多结热转换器（PMJTC）用于电压和电流的AC-DC传输已得到广泛认可。通常，三维多结热转换器（MJTC）具有精度优势，而单结热转换器（SJTC）具有低成本优势。 PMJTC具有长期稳定性，高灵敏度和高动态频率范围。众所周知，PMJTC在音频范围内显示出较小的交流-直流电压传递差异。但是，很难在低频下获得小的AC-DC传输差，尤其是对于基于薄膜的热转换器而言。低频下较小的ac-dc传输差异是由热传递机制（薄膜中）和热电转换过程（薄膜热电偶）中的非线性引起的。进行这项研究是为了在低频下工作的薄膜chromel-铝热转换器上实现较小的ac-dc传输差异。可选的硅方尖碑形成在薄膜下方，以最小化较低频率下的ac-dc传输差异。与没有方尖碑的标准配置相比，浮动方尖碑结构增强了等温操作并减缓了热传递，从而在低频下产生了较小的AC-DC传递差异。同样，薄膜热转换器也可以用作流量传感器和红外传感器。

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