β-FeSi_2 Continuous Films Prepared on Corning 7059 Glass by RF-Magnetron Sputtering

著录项

• 来源
  《Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers》 |2005年第9a期|p.6505-6507|共3页
• 作者

  Yukiko Okuda; Noritaka Momose; Masashi Takahashi; Yoshio Hashimoto; Kentaro Ito;

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• 作者单位

  Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University, 4-17-1 Wakasato, Nagano 380-8553, Japan;

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• 收录信息
• 原文格式 PDF
• 正文语种 eng
• 中图分类 应用物理学;
• 关键词

  iron disilicide; continuous film; corning 7059 glass; vacuum annealing; X-ray diffraction; focused-ion beam; secondary-ion microscope; scanning probe microscope; hall measurement; X-ray photoelectron spectroscopy;

  机译：二硅化铁;连续膜;角膜7059玻璃;真空退火;X射线衍射;聚焦离子束;二次离子显微镜;扫描探针显微镜;霍尔测量;X射线光电子能谱;