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首页> 外文期刊>Japanese Journal of Applied Physics. Part 1, Regular Papers & Short Notes >The Characteristics of Reactively Sputtered AgO_x Films Prepared at Different Oxygen Flow Ratios and Its Effect on Super-Resolution Near-Field Properties
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The Characteristics of Reactively Sputtered AgO_x Films Prepared at Different Oxygen Flow Ratios and Its Effect on Super-Resolution Near-Field Properties

机译：不同氧流量比反应溅射AgO_x薄膜的特性及其对超分辨近场性能的影响

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摘要

The characteristics of several reactively sputtered AgO_x films, prepared at different oxygen flow ratios, with and without ZnS-SiO_2 protective layers have been examined. For the as-deposited AgO_x films, the amount and size of Ag clusters decreased, and the constituent phase of AgO_x gradually transferred from pure Ag_2O, to a mixture of Ag_2O and AgO, then to pure AgO, as the oxygen flow ratio was increased. After annealing, the reduction of AgO into Ag_2O and decomposition of Ag_2O into Ag and O_2 took place, and the decomposed Ag elements would diffuse outward and precipitate small silver particles on the surface of ZnS-SiO_2 protective layers. The chemical decomposition of AgO_x film confined by ZnS-SiO_2 protective layers was confirmed to be an irreversible process. The super-resolution near field effect becomes significant only when the super-resolution near-field structure (super-RENS) disk with an AgO_x mask layer prepared at oxygen flow ratios above a threshold value, where AgO_x film consists of Ag_2O or AgO phase.
机译：研究了几种在不同氧气流量比下制备的带有和不带有ZnS-SiO_2保护层的反应溅射AgO_x薄膜的特性。对于沉积的AgO_x膜，随着氧流量的增加，Ag簇的数量和大小减小，并且AgO_x的组成相逐渐从纯Ag_2O转移到Ag_2O和AgO的混合物中，然后转移到纯AgO。退火后，AgO还原为Ag_2O，Ag_2O分解为Ag和O_2，分解后的Ag元素向外扩散并在ZnS-SiO_2保护层表面沉淀出小的银颗粒。证实了由ZnS-SiO_2保护层限制的AgO_x膜的化学分解是不可逆的过程。仅当具有以高于阈值的氧气流量比制备的具有AgO_x掩模层的超分辨率近场结构（super-RENS）盘（其中AgO_x膜由Ag_2O或AgO相组成）时，超分辨率近场结构才有意义。

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