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首页> 外文期刊>Japanese journal of applied physics >Evaluation of electromechanical transduction efficiency of p-n diode actuators with a silicon tuning fork resonator
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Evaluation of electromechanical transduction efficiency of p-n diode actuators with a silicon tuning fork resonator

机译：用硅音叉谐振器评估p-n二极管致动器的机电转换效率

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In this paper, we describe the electromechanical transduction efficiency of p-n diode actuators that are laterally driven by a force induced in a depletion layer. In order to experimentally evaluate the electromechanical transduction efficiency, we fabricated a U-shaped tuning fork resonator, which integrated the p-n diode and electrostatic actuators on a chip. The vibration amplitude was evaluated by measuring the output current passing through an electrostatic sensor. From an analytical model, the displacement generated by p-n diode actuators was shown to be independent of the DC bias voltage, and a constant output current passes even at a DC voltage of 0 V. Good agreement of the experimental results and the theory was confirmed. By comparing the measured values of the output current for p-n diode actuators with those for electrostatic actuators, it was found that p-n diode actuators with high impurity concentration have high electromechanical transduction efficiency. The resonant frequency for p-n diode actuators was also independent of the DC bias. Since these DC dependences are very different from those of widely used electrostatic actuators, p-n diode actuators are expected to be widely used, especially for applications requiring a low driving voltage including mobile applications. (C) 2018 The Japan Society of Applied Physics
机译：在本文中，我们描述了由耗尽层中感应出的力横向驱动的p-n二极管致动器的机电转换效率。为了实验评估机电转换效率，我们制造了一个U形音叉谐振器，该谐振器将p-n二极管和静电致动器集成在一个芯片上。通过测量流过静电传感器的输出电流来评估振动幅度。从解析模型可以看出，p-n二极管致动器产生的位移与DC偏置电压无关，即使在0 V的DC电压下也能通过恒定的输出电流。实验结果与理论吻合良好。通过将p-n二极管致动器的输出电流的测量值与静电致动器的输出电流的测量值进行比较，发现具有高杂质浓度的p-n二极管致动器具有较高的机电转换效率。 p-n二极管致动器的谐振频率也与直流偏置无关。由于这些直流相关性与广泛使用的静电致动器非常不同，因此，p-n二极管致动器有望被广泛使用，特别是对于要求低驱动电压的应用，包括移动应用。 （C）2018日本应用物理学会

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