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首页> 外文期刊>Japanese journal of applied physics >Analysis of longitudinal leaky surface acoustic wave propagation characteristics on a piezoelectric ScAIN layer/sapphire or quartz substrate
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Analysis of longitudinal leaky surface acoustic wave propagation characteristics on a piezoelectric ScAIN layer/sapphire or quartz substrate

机译：压电ScAIN层/蓝宝石或石英衬底上的纵向泄漏表面声波传播特性分析

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摘要

Longitudinal leaky surface acoustic wave (LLSAW) modes with a high phase velocity are suitable for high-frequency SAW filter applications. However, their attenuation is higher than that of other SAW modes, causing a small Q factor. On the other hand, a low attenuation and high coupling factor K-2 in LLSAWs on a piezoelectric thin plate/high-velocity sapphire or quartz substrate have been demonstrated theoretically and experimentally. We expected that LLSAWs propagating on a highly piezoelectric ScAlN layer/sapphire or quartz substrate also have a high phase velocity, high K2 and low attenuation. In this study, the characteristics of LLSAWs on ScAlN layer/sapphire or quartz substrates were theoretically investigated. The cut angle and SAW propagation direction of quartz substrates strongly affect the attenuation of LLSAWs on the layered structure. We found that a LLSAW resonator with (0 degrees 90 degrees 90 degrees) Sc0.4Al0.6N layer/X-cut 30 degrees Y propagation quartz has a high Q factor and high K-2, which is adequate for SAW filter applications. (C) 2019 The Japan Society of Applied Physics
机译：具有高相速度的纵向泄漏表面声波（LLSAW）模式适用于高频SAW滤波器应用。但是，它们的衰减高于其他SAW模式的衰减，从而导致较小的Q因子。另一方面，从理论和实验上证明了压电薄板/高速蓝宝石或石英衬底上的LLSAW中的低衰减和高耦合因子K-2。我们期望在高度压电的ScAlN层/蓝宝石或石英衬底上传播的LLSAW也具有高相速度，高K2和低衰减。在这项研究中，从理论上研究了ScAlN层/蓝宝石或石英衬底上LLSAW的特性。石英基板的切角和SAW传播方向强烈影响层状结构上LLSAW的衰减。我们发现，具有（0度90度90度）Sc0.4Al0.6N层/ X切割30度Y传播石英的LLSAW谐振器具有较高的Q因子和较高的K-2，非常适合SAW滤波器应用。 （C）2019日本应用物理学会

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  • 来源
    《Japanese journal of applied physics》 |2019年第sg期|SGGC08.1-SGGC08.6|共6页
  • 作者

    Suzuki Masashi; Sawada Naoya; Kakio Shoji;

  • 作者单位

    Univ Yamanashi, Grad Fac Interdisciplinary Res, Kofu, Yamanashi 4008511, Japan;

    Univ Yamanashi, Grad Fac Interdisciplinary Res, Kofu, Yamanashi 4008511, Japan;

    Univ Yamanashi, Grad Fac Interdisciplinary Res, Kofu, Yamanashi 4008511, Japan;

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