Spatial resolution of soft-error sensitive-depth analysis by scanning two-photon absorption laser microscopy

Itsuji Hiroaki; Kobayashi Daisuke; Hirose Kazuyuki

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Spatial resolution of soft-error sensitive-depth analysis by scanning two-photon absorption laser microscopy

机译：通过扫描双光子吸收激光显微镜通过扫描软误差敏感深度分析的空间分辨率

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摘要

Soft errors are widely recognized as a reliability issue, and are a circuit malfunction caused by particle radiation. Identifying soft-error sensitive volumes of a semiconductor circuit is useful for evaluating soft-error sensitivity and developing countermeasures against soft errors. This paper quantifies the spatial resolution of soft-error sensitive-volume analysis by scanning two-photon absorption laser microscopy. We identify the critical parameter determining the spatial resolution in the depth direction and demonstrate that optimal parameter selection can extract soft-error sensitive depths of current LSIs.

机译：软误差被广泛被认为是可靠性问题，是粒子辐射引起的电路故障。识别半导体电路的软误差敏感体积可用于评估软误差灵敏度和对软误差的显影对策。本文通过扫描双光子吸收激光显微镜来量化软误差敏感体积分析的空间分辨率。我们识别在深度方向上确定空间分辨率的关键参数，并证明最佳参数选择可以提取电流LSI的软误差敏感深度。

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来源
《Japanese journal of applied physics》 |2020年第10期|106501.1-106501.5|共5页
作者
Itsuji Hiroaki; Kobayashi Daisuke; Hirose Kazuyuki;
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作者单位

Univ Tokyo Grad Sch Engn Dept Elect Engn & Informat Syst Bunkyo Ku Tokyo 1138656 Japan|JAXA Inst Space & Astronaut Sci Sagamihara Kanagawa 2525210 Japan;

Univ Tokyo Grad Sch Engn Dept Elect Engn & Informat Syst Bunkyo Ku Tokyo 1138656 Japan|JAXA Inst Space & Astronaut Sci Sagamihara Kanagawa 2525210 Japan;

Univ Tokyo Grad Sch Engn Dept Elect Engn & Informat Syst Bunkyo Ku Tokyo 1138656 Japan|JAXA Inst Space & Astronaut Sci Sagamihara Kanagawa 2525210 Japan;

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正文语种 eng
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关键词
soft error; single event; semiconductor reliability; two photon absorption; silicon on insulator;

机译：软错误;单事件;半导体可靠性;两个光子吸收;绝缘体上的硅;

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2. Non-de-scanned parallel recording two-photon hyperspectral microscopy with high spectral and spatial resolution [J] . Szu-Yu Chen, Chiao-Sheng Lu, Chia-Hua Yeh Biomedical Optics Express . 2014,第2期

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4. Mid-infrared absorption microscopy with λ/100 spatial resolution using tunable quantum cascade lasers [C] . Lu Feng, Belkin Mikhail 2011 Conference on lasers and electro-optics . 2011

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5. Adaptive optics two-photon scanning laser fluorescence microscopy. [D] . Zhou, Yaopeng. 2009

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6. Determination of Spatial Distributions of Zinc and Active Biomass in Microbial Biofilms by Two-Photon Laser Scanning Microscopy [O] . Zhiqiang Hu, Gabriela Hidalgo, Paul L. Houston, 2005

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Spatial resolution of soft-error sensitive-depth analysis by scanning two-photon absorption laser microscopy

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