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首页> 外文期刊>Japanese journal of applied physics >Thin-film emitter based on a tungsten-DLC multilayer
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Thin-film emitter based on a tungsten-DLC multilayer

机译：基于Tungsten-DLC多层的薄膜发射器

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摘要

Nanostructure emitters are an alternative low-power approach to generate electrons and provide control of the electron energy, digital control, and a small device size compared to that of conventional thermal emitters. Carbon nanotubes (CNTs) have been intensively investigated and reported to have excellent properties due to their high aspect ratio, high thermal conductivity, and chemical inertness. However, manufactured CNTs have uniformity issues, and this leads to problems with the characterization of X-ray tubes, including their current and lifetime. In this study, we propose a new cold cathode emitter based on a tungsten and diamond-like carbon multilayer with a sapphire supported plate to ensure durability and a homogeneous manufactured structure. We conducted the deposition of the emitter components at the nanoscale by using a homemade high vacuum system to demonstrate its viability for X-ray sources. A numerical simulation was also conducted to demonstrate its viability.
机译：纳米结构发射器是一种替代的低功率方法来产生电子，并提供与传统热发射器相比的电子能量，数字控制和小器件尺寸的控制。由于它们的高纵横比，高导热率和化学惰性，已经强烈地研究并报道了具有优异性能的碳纳米管（CNT）。然而，制造的CNT具有均匀性问题，这导致X射线管表征的问题，包括它们的电流和寿命。在这项研究中，我们提出了一种基于钨和金刚石的碳多层的新的冷阴极发射器，其具有蓝宝石支撑板，以确保耐久性和均匀的制造结构。我们通过使用自制高真空系统对纳米级进行发射器组分的沉积，以展示其对X射线源的活力。还进行了数值模拟以证明其可行性。

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